TY - GEN
T1 - Morphology and microstructure of carbon nanotubes grown by hot filament chemical vapor deposition
AU - Yung, K. P.
AU - Wei, J.
AU - Tay, B. K.
PY - 2004
Y1 - 2004
N2 - In this study, carbon nanotubes growth on Ni foil using hot filament chemical vapor deposition is reported. The effects of C2H2 concentration, deposition time, temperature and working pressure on CNTs growth were investigated. The morphology and microstructure of the films were measured and analyzed by scanning electron microscope and the graphitized structures were confirmed by Raman spectra. Deposition temperature followed by deposition time had the most significant effect on carbon nanotube length. An increase in film thickness suffered from reducing density in the case of increased C 2H2 concentration, deposition time and deposition temperature. Higher working pressure led to the growth of denser and longer nanotubes.
AB - In this study, carbon nanotubes growth on Ni foil using hot filament chemical vapor deposition is reported. The effects of C2H2 concentration, deposition time, temperature and working pressure on CNTs growth were investigated. The morphology and microstructure of the films were measured and analyzed by scanning electron microscope and the graphitized structures were confirmed by Raman spectra. Deposition temperature followed by deposition time had the most significant effect on carbon nanotube length. An increase in film thickness suffered from reducing density in the case of increased C 2H2 concentration, deposition time and deposition temperature. Higher working pressure led to the growth of denser and longer nanotubes.
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M3 - Conference contribution
AN - SCOPUS:28444466288
SN - 0780388216
SN - 9780780388215
T3 - Proceedings of 6th Electronics Packaging Technology Conference, EPTC 2004
SP - 138
EP - 142
BT - Proceedings of 6th Electronics Packaging Technology Conference, EPTC 2004
A2 - Toh, K.C.
A2 - Mui, Y.C.
A2 - How, J.
A2 - Pang, J.H.L.
T2 - 6th Electronics Packaging Technology Conference, EPTC 2004
Y2 - 8 December 2005 through 10 December 2005
ER -