Nickel silicide formation on Si(100) and poly-Si with a presilicide N2+ implantation

P. S. Lee*, D. Mangelinck, K. L. Pey, J. Ding, D. Z. Chi, J. Y. Dai, A. See

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

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