Abstract
Pyroelectric infrared detectors using sol-gel deposited lead zirconate titanate (PZT) thin films were fabricated. It was found that specific detectivity D* of the detector is a strong function of the modulation frequency of the incident radiation. Noise plays an important role at low frequencies (< 20 Hz). When the modulation frequency is low (< 10 Hz), the noise is dominated by 1/f noise. Johnson noise dominates the noise at frequencies higher than 10 Hz. This characteristic can be clearly seen from the noise-frequency spectrum. A one-dimensional heat conduction theoretical model was used to simulate the dynamic responses of the pyroelectric IR detector. The simulated results fitted quite well with the experimental results. D* of the detector was predicted with the assumption that the Johnson noise was the dominating noise source.
| Original language | English |
|---|---|
| Pages (from-to) | 785-791 |
| Number of pages | 7 |
| Journal | Microelectronic Engineering |
| Volume | 66 |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - Apr 2003 |
| Externally published | Yes |
| Event | IUMRS-ICEM 2002 - Xi an, China Duration: Jun 10 2002 → Jun 14 2002 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
Keywords
- Noises
- Pyroelectric
- Specific detectivity