Abstract
Nonvolatile memory devices utilizing ZnO nanoparticles (NPs) embedded in an amorphous carbon (a-C) dielectric layer were investigated by capacitance-voltage (C-V) measurements. C-V curves for the Al/ZnO NPs embedded in an amorphous carbon layer/SiO2/p-Si capacitor at 298 K showed a clockwise hysteresis with flat band voltage shift due to charge trapping in the ZnO NPs. Capacitance-time measurements showed that the devices exhibited excellent memory retention ability under ambient conditions. Operating mechanism for the memory devices was proposed based on the C-V results.
Original language | English |
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Pages (from-to) | 702091-702093 |
Number of pages | 3 |
Journal | Japanese Journal of Applied Physics |
Volume | 49 |
Issue number | 7 PART 1 |
DOIs | |
Publication status | Published - Jul 2010 |
Externally published | Yes |
ASJC Scopus Subject Areas
- General Engineering
- General Physics and Astronomy