Abstract
Three outstanding midgap density-of-states (DOS) features of aluminum (Al) oxide was identified with deep level transient spectroscopy (DLTS) and optical absorption spectroscopy. The DOS feature at 0.39 eV, which disappears at 200°C was assigned as the amorphous band tail states. The two midgap lone-pair states at 1.0 and 1.3 eV disappear at 400°C, which conincides with x-ray photoelectron spectroscopic DOS features from other metal-oxide surfaces. The results show that the absorption coefficient for the annealed films depends on the annealing temperature, especially in the range of higher photon energy.
Original language | English |
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Pages (from-to) | 4147-4150 |
Number of pages | 4 |
Journal | Journal of Applied Physics |
Volume | 95 |
Issue number | 8 |
DOIs | |
Publication status | Published - Apr 15 2004 |
Externally published | Yes |
ASJC Scopus Subject Areas
- General Physics and Astronomy