Oxygen lone-pair states near the valence band edge of aluminum oxide thin films

Z. W. Zhao, B. K. Tay*, Chang Q. Sun, V. Ligatchev

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

Three outstanding midgap density-of-states (DOS) features of aluminum (Al) oxide was identified with deep level transient spectroscopy (DLTS) and optical absorption spectroscopy. The DOS feature at 0.39 eV, which disappears at 200°C was assigned as the amorphous band tail states. The two midgap lone-pair states at 1.0 and 1.3 eV disappear at 400°C, which conincides with x-ray photoelectron spectroscopic DOS features from other metal-oxide surfaces. The results show that the absorption coefficient for the annealed films depends on the annealing temperature, especially in the range of higher photon energy.

Original languageEnglish
Pages (from-to)4147-4150
Number of pages4
JournalJournal of Applied Physics
Volume95
Issue number8
DOIs
Publication statusPublished - Apr 15 2004
Externally publishedYes

ASJC Scopus Subject Areas

  • General Physics and Astronomy

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