Pd Surface modification of sno2-based nanorod arrays for h2 gas sensors

Hui Huang; Y. C. Lee; C. L. Chow; C. Y. Ong; M. S. Tse; O. K. Tan

doi:10.1109/ICSENS.2008.4716396

Pd Surface modification of sno2-based nanorod arrays for h2 gas sensors

Hui Huang, Y. C. Lee, C. L. Chow, C. Y. Ong, M. S. Tse, O. K. Tan

Nanyang Technological University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

In this work, SnO₂ nanorod arrays have been deposited by inductively coupled plasma-enhanced chemical vapor deposition (PECVD) without any high temperature treatment or additional catalysis. The SnO₂ nanorods are connected at the root with a very thin seed layer on the substrate. The SnO₂ nanorods have a spatial distribution density of 350 μm^-2 and large surface area of around 108 m²/g. Pd was chemically modified on surface of the SnO₂ nanorods by spin coating. The sensitivity of the SnO₂ nanorod arrays increased around 4 times after doping with 1 layer of Pd, but decreased continuously with increasing Pd layers. The effect of the annealing temperature on the sensing properties was also studied and it was found that annealing at 500°C is enough to achieve better performance of the Pd-doped SnO₂ nanorod array sensor.

Original language	English
Title of host publication	2008 IEEE Sensors, SENSORS 2008
Pages	114-117
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2008.4716396
Publication status	Published - 2008
Externally published	Yes
Event	2008 IEEE Sensors, SENSORS 2008 - Lecce, Italy Duration: Oct 26 2008 → Oct 29 2009

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	2008 IEEE Sensors, SENSORS 2008
Country/Territory	Italy
City	Lecce
Period	10/26/08 → 10/29/09

ASJC Scopus Subject Areas

Electrical and Electronic Engineering

Access to Document

10.1109/ICSENS.2008.4716396

Cite this

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title = "Pd Surface modification of sno2-based nanorod arrays for h2 gas sensors",

abstract = "In this work, SnO2 nanorod arrays have been deposited by inductively coupled plasma-enhanced chemical vapor deposition (PECVD) without any high temperature treatment or additional catalysis. The SnO2 nanorods are connected at the root with a very thin seed layer on the substrate. The SnO2 nanorods have a spatial distribution density of 350 μm-2 and large surface area of around 108 m2/g. Pd was chemically modified on surface of the SnO2 nanorods by spin coating. The sensitivity of the SnO2 nanorod arrays increased around 4 times after doping with 1 layer of Pd, but decreased continuously with increasing Pd layers. The effect of the annealing temperature on the sensing properties was also studied and it was found that annealing at 500°C is enough to achieve better performance of the Pd-doped SnO2 nanorod array sensor.",

author = "Hui Huang and Lee, {Y. C.} and Chow, {C. L.} and Ong, {C. Y.} and Tse, {M. S.} and Tan, {O. K.}",

year = "2008",

doi = "10.1109/ICSENS.2008.4716396",

language = "English",

isbn = "9781424425808",

series = "Proceedings of IEEE Sensors",

pages = "114--117",

booktitle = "2008 IEEE Sensors, SENSORS 2008",

note = "2008 IEEE Sensors, SENSORS 2008 ; Conference date: 26-10-2008 Through 29-10-2009",

}

TY - GEN

T1 - Pd Surface modification of sno2-based nanorod arrays for h2 gas sensors

AU - Huang, Hui

AU - Lee, Y. C.

AU - Chow, C. L.

AU - Ong, C. Y.

AU - Tse, M. S.

AU - Tan, O. K.

PY - 2008

Y1 - 2008

N2 - In this work, SnO2 nanorod arrays have been deposited by inductively coupled plasma-enhanced chemical vapor deposition (PECVD) without any high temperature treatment or additional catalysis. The SnO2 nanorods are connected at the root with a very thin seed layer on the substrate. The SnO2 nanorods have a spatial distribution density of 350 μm-2 and large surface area of around 108 m2/g. Pd was chemically modified on surface of the SnO2 nanorods by spin coating. The sensitivity of the SnO2 nanorod arrays increased around 4 times after doping with 1 layer of Pd, but decreased continuously with increasing Pd layers. The effect of the annealing temperature on the sensing properties was also studied and it was found that annealing at 500°C is enough to achieve better performance of the Pd-doped SnO2 nanorod array sensor.

AB - In this work, SnO2 nanorod arrays have been deposited by inductively coupled plasma-enhanced chemical vapor deposition (PECVD) without any high temperature treatment or additional catalysis. The SnO2 nanorods are connected at the root with a very thin seed layer on the substrate. The SnO2 nanorods have a spatial distribution density of 350 μm-2 and large surface area of around 108 m2/g. Pd was chemically modified on surface of the SnO2 nanorods by spin coating. The sensitivity of the SnO2 nanorod arrays increased around 4 times after doping with 1 layer of Pd, but decreased continuously with increasing Pd layers. The effect of the annealing temperature on the sensing properties was also studied and it was found that annealing at 500°C is enough to achieve better performance of the Pd-doped SnO2 nanorod array sensor.

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M3 - Conference contribution

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SN - 9781424425808

T3 - Proceedings of IEEE Sensors

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BT - 2008 IEEE Sensors, SENSORS 2008

T2 - 2008 IEEE Sensors, SENSORS 2008

Y2 - 26 October 2008 through 29 October 2009

ER -

Pd Surface modification of sno2-based nanorod arrays for h2 gas sensors

Abstract

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ASJC Scopus Subject Areas

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