Phase-Engineered Synthesis of Centimeter-Scale 1T′- and 2H-Molybdenum Ditelluride Thin Films

Jin Cheol Park; Seok Joon Yun; Hyun Kim; Ji Hoon Park; Sang Hoon Chae; Sung Jin An; Jeong Gyun Kim; Soo Min Kim; Ki Kangk Kim; Young Hee Lee

doi:10.1021/acsnano.5b02511

Phase-Engineered Synthesis of Centimeter-Scale 1T′- and 2H-Molybdenum Ditelluride Thin Films

Jin Cheol Park, Seok Joon Yun, Hyun Kim, Ji Hoon Park, Sang Hoon Chae, Sung Jin An, Jeong Gyun Kim, Soo Min Kim, Ki Kangk Kim^*, Young Hee Lee

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

243 Citations (Scopus)

Abstract

We report the synthesis of centimeter-scale, uniform 1T′- and 2H-MoTe₂ thin films via the tellurization of Mo thin films. 1T′-MoTe₂ was initially grown and converted gradually to 2H-MoTe₂ over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichiometric 2H-MoTe₂ phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe₂ to 1T′-MoTe₂. The orientation of the 2H-MoTe₂ film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe₂ film over the entire area, while fast tellurization led to a 2H-MoTe₂ film with a randomly oriented c-axis.

Original language	English
Pages (from-to)	6548-6554
Number of pages	7
Journal	ACS Nano
Volume	9
Issue number	6
DOIs	https://doi.org/10.1021/acsnano.5b02511
Publication status	Published - Jun 23 2015
Externally published	Yes

Bibliographical note

Publisher Copyright:
© 2015 American Chemical Society.

ASJC Scopus Subject Areas

General Materials Science
General Engineering
General Physics and Astronomy

Keywords

chemical vapor deposition
molybdenum ditelluride
phase engineering
phase transition
tellurization

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10.1021/acsnano.5b02511

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title = "Phase-Engineered Synthesis of Centimeter-Scale 1T′- and 2H-Molybdenum Ditelluride Thin Films",

abstract = "We report the synthesis of centimeter-scale, uniform 1T′- and 2H-MoTe2 thin films via the tellurization of Mo thin films. 1T′-MoTe2 was initially grown and converted gradually to 2H-MoTe2 over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichiometric 2H-MoTe2 phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe2 to 1T′-MoTe2. The orientation of the 2H-MoTe2 film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe2 film over the entire area, while fast tellurization led to a 2H-MoTe2 film with a randomly oriented c-axis.",

keywords = "chemical vapor deposition, molybdenum ditelluride, phase engineering, phase transition, tellurization",

author = "Park, {Jin Cheol} and Yun, {Seok Joon} and Hyun Kim and Park, {Ji Hoon} and Chae, {Sang Hoon} and An, {Sung Jin} and Kim, {Jeong Gyun} and Kim, {Soo Min} and Kim, {Ki Kangk} and Lee, {Young Hee}",

note = "Publisher Copyright: {\textcopyright} 2015 American Chemical Society.",

year = "2015",

month = jun,

day = "23",

doi = "10.1021/acsnano.5b02511",

language = "English",

volume = "9",

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AU - Park, Jin Cheol

AU - Yun, Seok Joon

AU - Kim, Hyun

AU - Park, Ji Hoon

AU - Chae, Sang Hoon

AU - An, Sung Jin

AU - Kim, Jeong Gyun

AU - Kim, Soo Min

AU - Kim, Ki Kangk

AU - Lee, Young Hee

PY - 2015/6/23

Y1 - 2015/6/23

N2 - We report the synthesis of centimeter-scale, uniform 1T′- and 2H-MoTe2 thin films via the tellurization of Mo thin films. 1T′-MoTe2 was initially grown and converted gradually to 2H-MoTe2 over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichiometric 2H-MoTe2 phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe2 to 1T′-MoTe2. The orientation of the 2H-MoTe2 film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe2 film over the entire area, while fast tellurization led to a 2H-MoTe2 film with a randomly oriented c-axis.

AB - We report the synthesis of centimeter-scale, uniform 1T′- and 2H-MoTe2 thin films via the tellurization of Mo thin films. 1T′-MoTe2 was initially grown and converted gradually to 2H-MoTe2 over a prolonged growth time under a Te atmosphere. Maintaining excessive Te was essential for obtaining the stable stoichiometric 2H-MoTe2 phase. Further annealing under a lower partial pressure of Te at the same temperature, followed by a rapid quenching, led to the reverse phase transition from 2H-MoTe2 to 1T′-MoTe2. The orientation of the 2H-MoTe2 film was determined by the tellurization rate. Slow tellurization was the key for obtaining a highly oriented 2H-MoTe2 film over the entire area, while fast tellurization led to a 2H-MoTe2 film with a randomly oriented c-axis.

KW - chemical vapor deposition

KW - molybdenum ditelluride

KW - phase engineering

KW - phase transition

KW - tellurization

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Phase-Engineered Synthesis of Centimeter-Scale 1T′- and 2H-Molybdenum Ditelluride Thin Films

Abstract

Bibliographical note

ASJC Scopus Subject Areas

Keywords

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