Phase formation in Ta-Si-N ternary system using the Gibbs free energy

P. Cao; S. P. Lau; B. K. Tay

Phase formation in Ta-Si-N ternary system using the Gibbs free energy

P. Cao^*, S. P. Lau, B. K. Tay

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

The thermodynamics calculation was conducted using Gibbs free energy to obtain Ta-Si-N ternary diagram. The stable phases in equilibrium have also been evaluated. Only TaN and TaSi₂ can stably coexist with Si₃N₄ at thermodynamic equilibrium. Limitation and assumptions are also presented in this paper.

Original language	English
Pages	315-318
Number of pages	4
Publication status	Published - 2001
Externally published	Yes
Event	9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems - Singapore, Singapore Duration: Sept 3 2001 → Sept 5 2001

Conference

Conference	9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems
Country/Territory	Singapore
City	Singapore
Period	9/3/01 → 9/5/01

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

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title = "Phase formation in Ta-Si-N ternary system using the Gibbs free energy",

abstract = "The thermodynamics calculation was conducted using Gibbs free energy to obtain Ta-Si-N ternary diagram. The stable phases in equilibrium have also been evaluated. Only TaN and TaSi2 can stably coexist with Si3N4 at thermodynamic equilibrium. Limitation and assumptions are also presented in this paper.",

author = "P. Cao and Lau, {S. P.} and Tay, {B. K.}",

year = "2001",

language = "English",

pages = "315--318",

note = "9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems ; Conference date: 03-09-2001 Through 05-09-2001",

}

Phase formation in Ta-Si-N ternary system using the Gibbs free energy. / Cao, P.; Lau, S. P.; Tay, B. K.
2001. 315-318 Paper presented at 9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems, Singapore, Singapore.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Phase formation in Ta-Si-N ternary system using the Gibbs free energy

AU - Cao, P.

AU - Lau, S. P.

AU - Tay, B. K.

PY - 2001

Y1 - 2001

N2 - The thermodynamics calculation was conducted using Gibbs free energy to obtain Ta-Si-N ternary diagram. The stable phases in equilibrium have also been evaluated. Only TaN and TaSi2 can stably coexist with Si3N4 at thermodynamic equilibrium. Limitation and assumptions are also presented in this paper.

AB - The thermodynamics calculation was conducted using Gibbs free energy to obtain Ta-Si-N ternary diagram. The stable phases in equilibrium have also been evaluated. Only TaN and TaSi2 can stably coexist with Si3N4 at thermodynamic equilibrium. Limitation and assumptions are also presented in this paper.

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M3 - Paper

AN - SCOPUS:1842690630

SP - 315

EP - 318

T2 - 9th International Symposium on Integrated Circuits, Devices and Systems, ISIC 2001: Proceedings - Low Power and Low Voltage Integrated Systems

Y2 - 3 September 2001 through 5 September 2001

ER -

Phase formation in Ta-Si-N ternary system using the Gibbs free energy

Abstract

Conference

ASJC Scopus Subject Areas

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