Plasma surface modification and gas sensing properties of SnO₂ thin films prepared by plasma enhanced chemical vapor deposition

O. K. Tan^*, H. Huang, Y. C. Lee, M. S. Tse, J. Guo, T. White

^*Corresponding author for this work

Nanyang Technological University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Material Science

Keyphrases

Engineering