Abstract
Scrubbers are widely used for air pollution treatment in semiconductor. Efficiency of waste gas treatment must be carefully maintained for environmental and health issue. However, due to the complex types of exhaust system and the needs of using chemicals with different characteristics at the same time in the semiconductor process, many conditions will occur in the operation of the scrubber tower and the processing efficiency will be reduced. This paper aims at the common problems such as growth of bacteria, unstable pH, white smoke, and inaccurate monitoring of exhaust gas flow rate. Based on the investigation, all the analysis, results and solutions are provided as practical reference for other semiconductor companies.
| Original language | English |
|---|---|
| Article number | 012074 |
| Journal | IOP Conference Series: Earth and Environmental Science |
| Volume | 859 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Oct 7 2021 |
| Externally published | Yes |
| Event | 2021 2nd Asia Conference on Geological Research and Environmental Technology, GRET 2021 - Kamakura City, Japan Duration: Aug 21 2021 → Aug 22 2021 |
Bibliographical note
Publisher Copyright:© Published under licence by IOP Publishing Ltd.
ASJC Scopus Subject Areas
- General Environmental Science
- General Earth and Planetary Sciences
Keywords
- Air pollution treatment
- Exhaust system operation
- Practical solutions
- Scrubber
- Semiconductor company