Preparation and optical properties of patternable TiO                         2                         /ormosils hybrid films for photonics applications

Wenxiu Que; X. Hu; Q. Y. Zhang

doi:10.1016/S0009-2614(02)02027-4

Preparation and optical properties of patternable TiO ₂ /ormosils hybrid films for photonics applications

Wenxiu Que^*, X. Hu, Q. Y. Zhang

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

Patternable TiO ₂ /organically modified silane hybrid films are synthesized by the sol-gel spin-coating technique. Optical properties and patterning of the hybrid film are studied. A continuous relief grating is fabricated by one-step spin-coating process followed by direct ultraviolet light imprinting based on a holographic interference lithographic system. UV-Visible (UV-Vis) spectroscopy and Fourier transform infrared spectroscopy have been used to study the optical and structural properties of the hybrid film. The propagation loss properties of the planar waveguide have also been estimated. The hardness and Young's modulus of the films show a dependence on the heat-treatment temperature.

Original language	English
Pages (from-to)	354-360
Number of pages	7
Journal	Chemical Physics Letters
Volume	369
Issue number	3-4
DOIs	https://doi.org/10.1016/S0009-2614(02)02027-4
Publication status	Published - Feb 17 2003
Externally published	Yes

ASJC Scopus Subject Areas

General Physics and Astronomy
Physical and Theoretical Chemistry

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10.1016/S0009-2614(02)02027-4

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@article{c26e5a7e3cb2489c97419a38cbd22686,

title = " Preparation and optical properties of patternable TiO 2 /ormosils hybrid films for photonics applications ",

abstract = " Patternable TiO 2 /organically modified silane hybrid films are synthesized by the sol-gel spin-coating technique. Optical properties and patterning of the hybrid film are studied. A continuous relief grating is fabricated by one-step spin-coating process followed by direct ultraviolet light imprinting based on a holographic interference lithographic system. UV-Visible (UV-Vis) spectroscopy and Fourier transform infrared spectroscopy have been used to study the optical and structural properties of the hybrid film. The propagation loss properties of the planar waveguide have also been estimated. The hardness and Young's modulus of the films show a dependence on the heat-treatment temperature.",

author = "Wenxiu Que and X. Hu and Zhang, {Q. Y.}",

year = "2003",

month = feb,

day = "17",

doi = "10.1016/S0009-2614(02)02027-4",

language = "English",

volume = "369",

pages = "354--360",

journal = "Chemical Physics Letters",

issn = "0009-2614",

publisher = "Elsevier",

number = "3-4",

}

Preparation and optical properties of patternable TiO ₂ /ormosils hybrid films for photonics applications . / Que, Wenxiu; Hu, X.; Zhang, Q. Y.
In: Chemical Physics Letters, Vol. 369, No. 3-4, 17.02.2003, p. 354-360.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - Preparation and optical properties of patternable TiO 2 /ormosils hybrid films for photonics applications

AU - Que, Wenxiu

AU - Hu, X.

AU - Zhang, Q. Y.

PY - 2003/2/17

Y1 - 2003/2/17

N2 - Patternable TiO 2 /organically modified silane hybrid films are synthesized by the sol-gel spin-coating technique. Optical properties and patterning of the hybrid film are studied. A continuous relief grating is fabricated by one-step spin-coating process followed by direct ultraviolet light imprinting based on a holographic interference lithographic system. UV-Visible (UV-Vis) spectroscopy and Fourier transform infrared spectroscopy have been used to study the optical and structural properties of the hybrid film. The propagation loss properties of the planar waveguide have also been estimated. The hardness and Young's modulus of the films show a dependence on the heat-treatment temperature.

AB - Patternable TiO 2 /organically modified silane hybrid films are synthesized by the sol-gel spin-coating technique. Optical properties and patterning of the hybrid film are studied. A continuous relief grating is fabricated by one-step spin-coating process followed by direct ultraviolet light imprinting based on a holographic interference lithographic system. UV-Visible (UV-Vis) spectroscopy and Fourier transform infrared spectroscopy have been used to study the optical and structural properties of the hybrid film. The propagation loss properties of the planar waveguide have also been estimated. The hardness and Young's modulus of the films show a dependence on the heat-treatment temperature.

UR - http://www.scopus.com/inward/record.url?scp=0037450557&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037450557&partnerID=8YFLogxK

U2 - 10.1016/S0009-2614(02)02027-4

DO - 10.1016/S0009-2614(02)02027-4

M3 - Article

AN - SCOPUS:0037450557

SN - 0009-2614

VL - 369

SP - 354

EP - 360

JO - Chemical Physics Letters

JF - Chemical Physics Letters

IS - 3-4

ER -

Preparation and optical properties of patternable TiO ₂ /ormosils hybrid films for photonics applications

Abstract

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