Abstract
A focused ion beam system was used to prepare site specific transmission electron microscopy plan view specimens. A new technique was used for this purpose. It consisted of milling a wedge shaped piece of material, lifting it out using needle and micromanipulator, and orientating it on the substrate with the original surface vertical. Based on the lift-out technique for the preparation of a cross-section specimen, the plane-view specimen was then milled from this piece of material.
| Original language | English |
|---|---|
| Pages (from-to) | 755-758 |
| Number of pages | 4 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 19 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - May 2001 |
| Externally published | Yes |
| Event | 13th International Vaccum Microelectronics Conference - Guangzhou, China Duration: Aug 14 2000 → Aug 17 2000 |
ASJC Scopus Subject Areas
- Condensed Matter Physics
- Electrical and Electronic Engineering