Properties of amorphous ZrO_x thin films deposited by filtered cathodic vacuum arc

Material Science

• Thin Films 100%
• Film 66%
• Amorphous Film 66%
• Surface (Surface Science) 33%
• X-Ray Diffraction 33%
• X-Ray Photoelectron Spectroscopy 33%
• Interface Property 33%
• Zirconia 33%
• Refractive Index 33%

Engineering

• Thin Films 100%
• Atomic Force Microscopy 33%
• High Resolution 33%
• Room Temperature 33%
• Ray Diffraction 33%
• Ray Photoelectron Spectroscopy 33%
• Band Gap 33%
• Refractive Index 33%
• Refractivity 33%
• Depth Profile 33%

Keyphrases

• ZrOx 100%
• Zirconium Oxide 33%
• Amorphous Zirconia 33%
• Bond Type 33%
• Oxide Thin Films 33%