Property study of aluminium oxide thin films by thermal annealing

Zhiwei Zhao; Beng Kang Tay

doi:10.1002/pssc.201084181

Property study of aluminium oxide thin films by thermal annealing

Zhiwei Zhao^*, Beng Kang Tay

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Aluminium oxide thin films had been prepared by off-plane filtered cathodic vacuum arc (FCVA) under the oxygen partial pressure of 5 × 10 ^-4 Torr at room temperature. Annealing effects on the properties of the films between 200 °C and 900 °C were investigated. Experiments results showed that the surfaces of aluminium oxide thin films remained smooth up to 600 °C. Crystallization is induced for the film annealed at 900 °C. It was also found that refractive index of the films increased with increasing the annealing temperature. Strong frequency dispersion of refractive index was found and fitted to a single oscillator model. The dispersion parameters, such as single oscillator energy, dispersion energy, average oscillator strength and its related wavelength, were estimated.

Original language	English
Pages (from-to)	77-80
Number of pages	4
Journal	Physica Status Solidi (C) Current Topics in Solid State Physics
Volume	9
Issue number	1
DOIs	https://doi.org/10.1002/pssc.201084181
Publication status	Published - Jan 2012
Externally published	Yes

ASJC Scopus Subject Areas

Condensed Matter Physics

Keywords

Aluminium oxide
Annealing
Optical dispersion

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10.1002/pssc.201084181

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AB - Aluminium oxide thin films had been prepared by off-plane filtered cathodic vacuum arc (FCVA) under the oxygen partial pressure of 5 × 10 -4 Torr at room temperature. Annealing effects on the properties of the films between 200 °C and 900 °C were investigated. Experiments results showed that the surfaces of aluminium oxide thin films remained smooth up to 600 °C. Crystallization is induced for the film annealed at 900 °C. It was also found that refractive index of the films increased with increasing the annealing temperature. Strong frequency dispersion of refractive index was found and fitted to a single oscillator model. The dispersion parameters, such as single oscillator energy, dispersion energy, average oscillator strength and its related wavelength, were estimated.

KW - Aluminium oxide

KW - Annealing

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Property study of aluminium oxide thin films by thermal annealing

Abstract

ASJC Scopus Subject Areas

Keywords

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