Proton beam writing of low-loss polymer optical waveguides

T. C. Sum; A. A. Bettiol; J. A. Van Kan; F. Watt; E. Y.B. Pun; K. K. Tung

doi:10.1063/1.1606502

Proton beam writing of low-loss polymer optical waveguides

T. C. Sum^*, A. A. Bettiol, J. A. Van Kan, F. Watt, E. Y.B. Pun, K. K. Tung

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

90 Citations (Scopus)

Abstract

A study was performed on proton beam writing of low-loss polymer optical waveguides. Low-loss channel waveguides in SU-8, a chemically amplified negative tone resist were fabricated. The results showed that waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits.

Original language	English
Pages (from-to)	1707-1709
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	9
DOIs	https://doi.org/10.1063/1.1606502
Publication status	Published - Sept 1 2003
Externally published	Yes

ASJC Scopus Subject Areas

Physics and Astronomy (miscellaneous)

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10.1063/1.1606502

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abstract = "A study was performed on proton beam writing of low-loss polymer optical waveguides. Low-loss channel waveguides in SU-8, a chemically amplified negative tone resist were fabricated. The results showed that waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits.",

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AU - Pun, E. Y.B.

AU - Tung, K. K.

PY - 2003/9/1

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AB - A study was performed on proton beam writing of low-loss polymer optical waveguides. Low-loss channel waveguides in SU-8, a chemically amplified negative tone resist were fabricated. The results showed that waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits.

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Proton beam writing of low-loss polymer optical waveguides

Abstract

ASJC Scopus Subject Areas

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