Proton beam writing of passive waveguides in PMMA

T. C. Sum; A. A. Bettiol; H. L. Seng; I. Rajta; J. A. Van Kan; F. Watt

doi:10.1016/S0168-583X(03)01028-0

Proton beam writing of passive waveguides in PMMA

T. C. Sum^*, A. A. Bettiol, H. L. Seng, I. Rajta, J. A. Van Kan, F. Watt

^*Corresponding author for this work

National University of Singapore

Research output: Contribution to journal › Conference article › peer-review

64 Citations (Scopus)

Abstract

Symmetric y-branch buried channel waveguides in poly-methylmethacrylate (PMMA) were fabricated by proton beam writing using a focused sub-micron beam of 1.5 and 2.0 MeV protons with a dose ranging from 25 to 160 nC/mm² (i.e. ∼1.6 × 10¹³ to 1.0 × 10¹⁴ particles/cm²) and beam currents of approximately 5-10 pA. The proton beam modifies the PMMA (i.e. changes the refractive index), forming buried channel waveguides near the end of range. The buried channel waveguides were end-coupled with monochromatic light (633 nm) and the transmitted intensity profiles were measured, indicating an intensity distribution of 0.45/0.55 from each branch. The surface compaction of the PMMA as a result of the irradiation for doses up to 160 nC/mm² was also investigated. From these investigations, the optimal fabrication conditions for proton beam writing of PMMA were established. Waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits.

Original language	English
Pages (from-to)	266-271
Number of pages	6
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	210
DOIs	https://doi.org/10.1016/S0168-583X(03)01028-0
Publication status	Published - Sept 2003
Externally published	Yes
Event	8th International Conference on Nuclear Microprobe Technology - Takasaki, Japan Duration: Sept 8 2002 → Sept 13 2002

ASJC Scopus Subject Areas

Nuclear and High Energy Physics
Instrumentation

Keywords

Buried channel waveguides
PMMA
Proton beam writing
Surface compaction

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10.1016/S0168-583X(03)01028-0

Cite this

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title = "Proton beam writing of passive waveguides in PMMA",

abstract = "Symmetric y-branch buried channel waveguides in poly-methylmethacrylate (PMMA) were fabricated by proton beam writing using a focused sub-micron beam of 1.5 and 2.0 MeV protons with a dose ranging from 25 to 160 nC/mm2 (i.e. ∼1.6 × 1013 to 1.0 × 1014 particles/cm2) and beam currents of approximately 5-10 pA. The proton beam modifies the PMMA (i.e. changes the refractive index), forming buried channel waveguides near the end of range. The buried channel waveguides were end-coupled with monochromatic light (633 nm) and the transmitted intensity profiles were measured, indicating an intensity distribution of 0.45/0.55 from each branch. The surface compaction of the PMMA as a result of the irradiation for doses up to 160 nC/mm2 was also investigated. From these investigations, the optimal fabrication conditions for proton beam writing of PMMA were established. Waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits.",

keywords = "Buried channel waveguides, PMMA, Proton beam writing, Surface compaction",

author = "Sum, \{T. C.\} and Bettiol, \{A. A.\} and Seng, \{H. L.\} and I. Rajta and \{Van Kan\}, \{J. A.\} and F. Watt",

year = "2003",

month = sep,

doi = "10.1016/S0168-583X(03)01028-0",

language = "English",

volume = "210",

pages = "266--271",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

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note = "8th International Conference on Nuclear Microprobe Technology ; Conference date: 08-09-2002 Through 13-09-2002",

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TY - JOUR

T1 - Proton beam writing of passive waveguides in PMMA

AU - Sum, T. C.

AU - Bettiol, A. A.

AU - Seng, H. L.

AU - Rajta, I.

AU - Van Kan, J. A.

AU - Watt, F.

PY - 2003/9

Y1 - 2003/9

N2 - Symmetric y-branch buried channel waveguides in poly-methylmethacrylate (PMMA) were fabricated by proton beam writing using a focused sub-micron beam of 1.5 and 2.0 MeV protons with a dose ranging from 25 to 160 nC/mm2 (i.e. ∼1.6 × 1013 to 1.0 × 1014 particles/cm2) and beam currents of approximately 5-10 pA. The proton beam modifies the PMMA (i.e. changes the refractive index), forming buried channel waveguides near the end of range. The buried channel waveguides were end-coupled with monochromatic light (633 nm) and the transmitted intensity profiles were measured, indicating an intensity distribution of 0.45/0.55 from each branch. The surface compaction of the PMMA as a result of the irradiation for doses up to 160 nC/mm2 was also investigated. From these investigations, the optimal fabrication conditions for proton beam writing of PMMA were established. Waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits.

AB - Symmetric y-branch buried channel waveguides in poly-methylmethacrylate (PMMA) were fabricated by proton beam writing using a focused sub-micron beam of 1.5 and 2.0 MeV protons with a dose ranging from 25 to 160 nC/mm2 (i.e. ∼1.6 × 1013 to 1.0 × 1014 particles/cm2) and beam currents of approximately 5-10 pA. The proton beam modifies the PMMA (i.e. changes the refractive index), forming buried channel waveguides near the end of range. The buried channel waveguides were end-coupled with monochromatic light (633 nm) and the transmitted intensity profiles were measured, indicating an intensity distribution of 0.45/0.55 from each branch. The surface compaction of the PMMA as a result of the irradiation for doses up to 160 nC/mm2 was also investigated. From these investigations, the optimal fabrication conditions for proton beam writing of PMMA were established. Waveguides of arbitrary design can be easily fabricated using proton beam writing, making the technique ideal for the rapid prototyping of optical circuits.

KW - Buried channel waveguides

KW - PMMA

KW - Proton beam writing

KW - Surface compaction

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DO - 10.1016/S0168-583X(03)01028-0

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AN - SCOPUS:0041473911

SN - 0168-583X

VL - 210

SP - 266

EP - 271

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

T2 - 8th International Conference on Nuclear Microprobe Technology

Y2 - 8 September 2002 through 13 September 2002

ER -

Proton beam writing of passive waveguides in PMMA

Abstract

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Keywords

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