Pupil plane masks for super-resolution in high-numerical-aperture focusing

In this paper, we describe the design and analyse the performance of a pupil plane mask to achieve super-resolution in high-numerical-aperture coherent focusing systems using linearly polarized incident illumination. We show that a practical resolution enhancement of approximately twice the diffraction-limited resolution is achievable. Our design method generalizes the paraxial theory of Frieden, as it establishes the theoretical limit of super-resolution in a high-numerical-aperture focusing system of a given space-bandwidth product.