Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc

B. K. Tay; X. Shi; H. S. Tan; H. S. Yang; Z. Sun

doi:10.1016/S0257-8972(98)00475-7

Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc

B. K. Tay, X. Shi, H. S. Tan, H. S. Yang, Z. Sun

President's Office

Research output: Contribution to journal › Article › peer-review

136 Citations (Scopus)

Abstract

Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp³/sp² bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp³ fraction.

Original language	English
Pages (from-to)	155-158
Number of pages	4
Journal	Surface and Coatings Technology
Volume	105
Issue number	1-2
DOIs	https://doi.org/10.1016/S0257-8972(98)00475-7
Publication status	Published - Jun 5 1998

ASJC Scopus Subject Areas

General Chemistry
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

Keywords

Cathodic vacuum arc
Raman studies
Tetrahedral amorphous carbon films

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10.1016/S0257-8972(98)00475-7

Cite this

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abstract = "Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp3/sp2 bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp3 fraction.",

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AU - Tay, B. K.

AU - Shi, X.

AU - Tan, H. S.

AU - Yang, H. S.

AU - Sun, Z.

PY - 1998/6/5

Y1 - 1998/6/5

N2 - Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp3/sp2 bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp3 fraction.

AB - Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp3/sp2 bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp3 fraction.

KW - Cathodic vacuum arc

KW - Raman studies

KW - Tetrahedral amorphous carbon films

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JO - Surface and Coatings Technology

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ER -

Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc

Abstract

ASJC Scopus Subject Areas

Keywords

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