Rare-Earth Oxides as High-k Gate Dielectrics for Advanced Device Architectures

Pooi See Lee*, Mei Yin Chan, Peter Damarwan

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationHigh-k Gate Dielectrics for CMOS Technology
PublisherWiley-VCH
Pages501-530
Number of pages30
ISBN (Print)9783527330324
DOIs
Publication statusPublished - Aug 23 2012
Externally publishedYes

ASJC Scopus Subject Areas

  • General Materials Science
  • General Engineering

Keywords

  • Device architecture
  • Dielectric constant
  • Fermi level pinning
  • Permittivity
  • Rare-earth oxides
  • Thermal stability

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