Reconfiguring nucleation for CVD growth of twisted bilayer MoS2 with a wide range of twist angles

Manzhang Xu; Hongjia Ji; Lu Zheng; Weiwei Li; Jing Wang; Hanxin Wang; Lei Luo; Qianbo Lu; Xuetao Gan; Zheng Liu; Xuewen Wang; Wei Huang

doi:10.1038/s41467-023-44598-w

Reconfiguring nucleation for CVD growth of twisted bilayer MoS₂ with a wide range of twist angles

Manzhang Xu, Hongjia Ji, Lu Zheng, Weiwei Li, Jing Wang, Hanxin Wang, Lei Luo, Qianbo Lu, Xuetao Gan, Zheng Liu, Xuewen Wang^*, Wei Huang^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

Twisted bilayer (TB) transition metal dichalcogenides (TMDCs) beyond TB-graphene are considered an ideal platform for investigating condensed matter physics, due to the moiré superlattices-related peculiar band structures and distinct electronic properties. The growth of large-area and high-quality TB-TMDCs with wide twist angles would be significant for exploring twist angle-dependent physics and applications, but remains challenging to implement. Here, we propose a reconfiguring nucleation chemical vapor deposition (CVD) strategy for directly synthesizing TB-MoS₂ with twist angles from 0° to 120°. The twist angles-dependent Moiré periodicity can be clearly observed, and the interlayer coupling shows a strong relationship to the twist angles. Moreover, the yield of TB-MoS₂ in bilayer MoS₂ and density of TB-MoS₂ are significantly improved to 17.2% and 28.9 pieces/mm² by tailoring gas flow rate and molar ratio of NaCl to MoO₃. The proposed reconfiguring nucleation approach opens an avenue for the precise growth of TB-TMDCs for both fundamental research and practical applications.

Original language	English
Article number	562
Journal	Nature Communications
Volume	15
Issue number	1
DOIs	https://doi.org/10.1038/s41467-023-44598-w
Publication status	Published - Dec 2024
Externally published	Yes

Bibliographical note

Publisher Copyright:
© 2024, The Author(s).

ASJC Scopus Subject Areas

General Chemistry
General Biochemistry,Genetics and Molecular Biology
General Physics and Astronomy

Access to Document

10.1038/s41467-023-44598-w

Cite this

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title = "Reconfiguring nucleation for CVD growth of twisted bilayer MoS2 with a wide range of twist angles",

abstract = "Twisted bilayer (TB) transition metal dichalcogenides (TMDCs) beyond TB-graphene are considered an ideal platform for investigating condensed matter physics, due to the moir{\'e} superlattices-related peculiar band structures and distinct electronic properties. The growth of large-area and high-quality TB-TMDCs with wide twist angles would be significant for exploring twist angle-dependent physics and applications, but remains challenging to implement. Here, we propose a reconfiguring nucleation chemical vapor deposition (CVD) strategy for directly synthesizing TB-MoS2 with twist angles from 0° to 120°. The twist angles-dependent Moir{\'e} periodicity can be clearly observed, and the interlayer coupling shows a strong relationship to the twist angles. Moreover, the yield of TB-MoS2 in bilayer MoS2 and density of TB-MoS2 are significantly improved to 17.2% and 28.9 pieces/mm2 by tailoring gas flow rate and molar ratio of NaCl to MoO3. The proposed reconfiguring nucleation approach opens an avenue for the precise growth of TB-TMDCs for both fundamental research and practical applications.",

author = "Manzhang Xu and Hongjia Ji and Lu Zheng and Weiwei Li and Jing Wang and Hanxin Wang and Lei Luo and Qianbo Lu and Xuetao Gan and Zheng Liu and Xuewen Wang and Wei Huang",

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AU - Xu, Manzhang

AU - Ji, Hongjia

AU - Zheng, Lu

AU - Li, Weiwei

AU - Wang, Jing

AU - Wang, Hanxin

AU - Luo, Lei

AU - Lu, Qianbo

AU - Gan, Xuetao

AU - Liu, Zheng

AU - Wang, Xuewen

AU - Huang, Wei

PY - 2024/12

Y1 - 2024/12

N2 - Twisted bilayer (TB) transition metal dichalcogenides (TMDCs) beyond TB-graphene are considered an ideal platform for investigating condensed matter physics, due to the moiré superlattices-related peculiar band structures and distinct electronic properties. The growth of large-area and high-quality TB-TMDCs with wide twist angles would be significant for exploring twist angle-dependent physics and applications, but remains challenging to implement. Here, we propose a reconfiguring nucleation chemical vapor deposition (CVD) strategy for directly synthesizing TB-MoS2 with twist angles from 0° to 120°. The twist angles-dependent Moiré periodicity can be clearly observed, and the interlayer coupling shows a strong relationship to the twist angles. Moreover, the yield of TB-MoS2 in bilayer MoS2 and density of TB-MoS2 are significantly improved to 17.2% and 28.9 pieces/mm2 by tailoring gas flow rate and molar ratio of NaCl to MoO3. The proposed reconfiguring nucleation approach opens an avenue for the precise growth of TB-TMDCs for both fundamental research and practical applications.

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