Refractive indices of textured indium tin oxide and zinc oxide thin films

Y. Yang; X. W. Sun; B. J. Chen; C. X. Xu; T. P. Chen; C. Q. Sun; B. K. Tay; Z. Sun

doi:10.1016/j.tsf.2005.12.265

Refractive indices of textured indium tin oxide and zinc oxide thin films

Y. Yang, X. W. Sun^*, B. J. Chen, C. X. Xu, T. P. Chen, C. Q. Sun, B. K. Tay, Z. Sun

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

80 Citations (Scopus)

Abstract

The refractive indices of textured indium tin oxide (ITO) and zinc oxide (ZnO) thin films were measured and compared. The ITO thin film grown on glass and ZnO buffered glass substrates by sputtering showed distinct differences; the refractive index of ITO on glass was about 0.05 higher than that of ITO on ZnO buffered glass in the whole visible spectrum. The ZnO thin film grown on glass and ITO buffered glass substrates by filtered vacuum arc also showed distinct differences; the refractive index of ZnO on glass was higher than that of ZnO on ITO buffered glass in the red and green region, but lower in the blue region. The largest refractive index difference of ZnO on glass and ITO buffered glass was about 0.1 in the visible spectrum. The refractive index variation was correlated with the crystal quality, surface morphology and conductivity of the thin films.

Original language	English
Pages (from-to)	95-101
Number of pages	7
Journal	Thin Solid Films
Volume	510
Issue number	1-2
DOIs	https://doi.org/10.1016/j.tsf.2005.12.265
Publication status	Published - Jul 3 2006
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Keywords

Conductivity
Ellipsometry
Indium tin oxide
Optical constants
Zinc oxide

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10.1016/j.tsf.2005.12.265

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title = "Refractive indices of textured indium tin oxide and zinc oxide thin films",

abstract = "The refractive indices of textured indium tin oxide (ITO) and zinc oxide (ZnO) thin films were measured and compared. The ITO thin film grown on glass and ZnO buffered glass substrates by sputtering showed distinct differences; the refractive index of ITO on glass was about 0.05 higher than that of ITO on ZnO buffered glass in the whole visible spectrum. The ZnO thin film grown on glass and ITO buffered glass substrates by filtered vacuum arc also showed distinct differences; the refractive index of ZnO on glass was higher than that of ZnO on ITO buffered glass in the red and green region, but lower in the blue region. The largest refractive index difference of ZnO on glass and ITO buffered glass was about 0.1 in the visible spectrum. The refractive index variation was correlated with the crystal quality, surface morphology and conductivity of the thin films.",

keywords = "Conductivity, Ellipsometry, Indium tin oxide, Optical constants, Zinc oxide",

author = "Y. Yang and Sun, {X. W.} and Chen, {B. J.} and Xu, {C. X.} and Chen, {T. P.} and Sun, {C. Q.} and Tay, {B. K.} and Z. Sun",

year = "2006",

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T1 - Refractive indices of textured indium tin oxide and zinc oxide thin films

AU - Yang, Y.

AU - Sun, X. W.

AU - Chen, B. J.

AU - Xu, C. X.

AU - Chen, T. P.

AU - Sun, C. Q.

AU - Tay, B. K.

AU - Sun, Z.

PY - 2006/7/3

Y1 - 2006/7/3

N2 - The refractive indices of textured indium tin oxide (ITO) and zinc oxide (ZnO) thin films were measured and compared. The ITO thin film grown on glass and ZnO buffered glass substrates by sputtering showed distinct differences; the refractive index of ITO on glass was about 0.05 higher than that of ITO on ZnO buffered glass in the whole visible spectrum. The ZnO thin film grown on glass and ITO buffered glass substrates by filtered vacuum arc also showed distinct differences; the refractive index of ZnO on glass was higher than that of ZnO on ITO buffered glass in the red and green region, but lower in the blue region. The largest refractive index difference of ZnO on glass and ITO buffered glass was about 0.1 in the visible spectrum. The refractive index variation was correlated with the crystal quality, surface morphology and conductivity of the thin films.

AB - The refractive indices of textured indium tin oxide (ITO) and zinc oxide (ZnO) thin films were measured and compared. The ITO thin film grown on glass and ZnO buffered glass substrates by sputtering showed distinct differences; the refractive index of ITO on glass was about 0.05 higher than that of ITO on ZnO buffered glass in the whole visible spectrum. The ZnO thin film grown on glass and ITO buffered glass substrates by filtered vacuum arc also showed distinct differences; the refractive index of ZnO on glass was higher than that of ZnO on ITO buffered glass in the red and green region, but lower in the blue region. The largest refractive index difference of ZnO on glass and ITO buffered glass was about 0.1 in the visible spectrum. The refractive index variation was correlated with the crystal quality, surface morphology and conductivity of the thin films.

KW - Conductivity

KW - Ellipsometry

KW - Indium tin oxide

KW - Optical constants

KW - Zinc oxide

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DO - 10.1016/j.tsf.2005.12.265

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SN - 0040-6090

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EP - 101

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Refractive indices of textured indium tin oxide and zinc oxide thin films

Abstract

ASJC Scopus Subject Areas

Keywords

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