Scanning homodyne interferometer for characterization of piezoelectric films and microelectromechanical systems devices

Chen Chao; Zhihong Wang; Weiguang Zhu; Ooikiang Tan

doi:10.1063/1.1932308

Scanning homodyne interferometer for characterization of piezoelectric films and microelectromechanical systems devices

Chen Chao, Zhihong Wang, Weiguang Zhu, Ooikiang Tan

Nanyang Technological University

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

A scanning homodyne interferometer is developed based on the combination of a modulated Mach-Zehnder interferometer and a high-precision two-dimensional translation stage. Due to its ultrahigh out-of-plane resolution (down to pico meters) and wide bandwidth potential, the scanning interferometer is well suited for characterization of piezoelectric thin films as well as for vibration measurement of microelectromechanical systems devices such as micromachined ultrasonic transducers.

Original language	English
Article number	063906
Journal	Review of Scientific Instruments
Volume	76
Issue number	6
DOIs	https://doi.org/10.1063/1.1932308
Publication status	Published - 2005
Externally published	Yes

ASJC Scopus Subject Areas

Instrumentation

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10.1063/1.1932308

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abstract = "A scanning homodyne interferometer is developed based on the combination of a modulated Mach-Zehnder interferometer and a high-precision two-dimensional translation stage. Due to its ultrahigh out-of-plane resolution (down to pico meters) and wide bandwidth potential, the scanning interferometer is well suited for characterization of piezoelectric thin films as well as for vibration measurement of microelectromechanical systems devices such as micromachined ultrasonic transducers.",

author = "Chen Chao and Zhihong Wang and Weiguang Zhu and Ooikiang Tan",

year = "2005",

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AU - Chao, Chen

AU - Wang, Zhihong

AU - Zhu, Weiguang

AU - Tan, Ooikiang

PY - 2005

Y1 - 2005

N2 - A scanning homodyne interferometer is developed based on the combination of a modulated Mach-Zehnder interferometer and a high-precision two-dimensional translation stage. Due to its ultrahigh out-of-plane resolution (down to pico meters) and wide bandwidth potential, the scanning interferometer is well suited for characterization of piezoelectric thin films as well as for vibration measurement of microelectromechanical systems devices such as micromachined ultrasonic transducers.

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Scanning homodyne interferometer for characterization of piezoelectric films and microelectromechanical systems devices

Abstract

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