Abstract
In this work we discuss the applications of confocal microscopy to non-destructive materials testing. After the introduction we briefly consider some important theoretical aspects of the microscope. We then move to discuss the possible imaging modes available for both surface and bulk microscopy. We present experimental images obtained with various types of imaging modes. Finally, an experimental confirmation for the theoretically predicted contrast mechanism is discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 418-422 |
| Number of pages | 5 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3407 |
| DOIs | |
| Publication status | Published - 1998 |
| Externally published | Yes |
| Event | International Conference on Applied Optical Metrology - Balatonfured, Hungary Duration: Jun 8 1998 → Jun 11 1998 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
Keywords
- Bulk Si
- Confocal microscopy
- Materials
- Non-destructive
- Scanning infra-red microscopy