Sol-gel derived PZT thick films with nano-sized microstructure

Engineering

• Coupling Coefficient 50%
• Diaphragm 50%
• Field-Emission Scanning Electron Microscopy 50%
• Lead Zirconate 50%
• Microphone Array 50%
• Piezoelectric 100%
• Processing Parameter 50%
• Ray Diffraction 50%
• Silicon Wafer 50%
• Titanate 50%

Material Science

• Crystallization 20%
• Electromechanical Coupling 20%
• Field Emission Scanning Electron Microscopy 20%
• Film 60%
• Lead Zirconate Titanate 20%
• Piezoelectricity 40%
• Silicon Wafer 20%
• Sol-Gel 100%
• Thick Films 100%
• X-Ray Diffraction 20%

Keyphrases

• High Electromechanical Coupling 33%
• Microspeaker 33%
• Piezoelectric Diaphragm 33%