Abstract
We report here on titania/organically modified silane hybrid materials produced by the sol-geli technique for optical waveguide applications. Acid catalyzed solutions of γ-glycidoxypropyltrimethoxysilane and methyltrimethoxysilane mixed with tetrapropylorthotitanate have been used as precursors for the hybrid materials. Waveguide films with a thickness about 1.3-μm have been prepared on a silicon substrate by a single-coating process and low-temperature heat treatment. Atomic force microscopy (AFM), thermal gravimetric analysis (TGA), UV-visible spectroscopy (UV-VIS), and Fourier transform infrared (FTIR) spectroscopy have been used to investigate the optical and structural properties of these waveguide films. The results have shown that dense, pore-free, and highly transparent films can be obtained by low temperature heat treatment. The planar waveguide propagation loss of the hybrid films has also been measured.
Original language | English |
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Pages (from-to) | 319-325 |
Number of pages | 7 |
Journal | Journal of Sol-Gel Science and Technology |
Volume | 28 |
Issue number | 3 |
DOIs | |
Publication status | Published - Nov 2003 |
Externally published | Yes |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Ceramics and Composites
- General Chemistry
- Biomaterials
- Condensed Matter Physics
- Materials Chemistry
Keywords
- Hybrid
- Optical properties
- Sol-gel technique
- Spectroscopy
- Waveguides