TY - GEN
T1 - Spectroscopic study of titanium oxide thin films at low temperatures by X-ray diffraction, Raman scattering, fourier transform infrared spectroscopy and photoluminescence
AU - Zhao, Zhiwei
AU - Tay, Beng Kang
PY - 2006
Y1 - 2006
N2 - Titanium oxide thin films were prepared by filtered cathodic vacuum arc (FCVA) at low temperatures ranged from room temperature to 330°C. Spectroscopic study of the deposited films were carried out by X-ray diffraction, Raman Scattering, Fourier transform infrared spectroscopy (FTIR) and photoluminescence (PL), respectively. The films remained amorphous up to the substrate temperature of 230°C. Nanocrystalline titanium oxide thin films occurred at 330°C with the strongest peak intensity from anatase (101) plane. The average grain size was around 20 nm and no rutile phase could be found. Various allowed vibrational frequencies (e.g. 152,199, 399, 640 cm -1) in Raman spectra and Ti-O-Ti transverse mode at 436 cm -1 in the FTIR spectrum evidently verified the presence of anatase phase in the films at 330°C. Moreover, at room temperature only crystalline film exhibited a PL peak with the center at 379 nm in PL spectrum and the origin is discussed.
AB - Titanium oxide thin films were prepared by filtered cathodic vacuum arc (FCVA) at low temperatures ranged from room temperature to 330°C. Spectroscopic study of the deposited films were carried out by X-ray diffraction, Raman Scattering, Fourier transform infrared spectroscopy (FTIR) and photoluminescence (PL), respectively. The films remained amorphous up to the substrate temperature of 230°C. Nanocrystalline titanium oxide thin films occurred at 330°C with the strongest peak intensity from anatase (101) plane. The average grain size was around 20 nm and no rutile phase could be found. Various allowed vibrational frequencies (e.g. 152,199, 399, 640 cm -1) in Raman spectra and Ti-O-Ti transverse mode at 436 cm -1 in the FTIR spectrum evidently verified the presence of anatase phase in the films at 330°C. Moreover, at room temperature only crystalline film exhibited a PL peak with the center at 379 nm in PL spectrum and the origin is discussed.
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U2 - 10.1557/proc-0928-gg13-03
DO - 10.1557/proc-0928-gg13-03
M3 - Conference contribution
AN - SCOPUS:33947635739
SN - 1558998853
SN - 9781558998858
T3 - Materials Research Society Symposium Proceedings
SP - 111
EP - 117
BT - Current and Future Trends of Functional Oxide Films
PB - Materials Research Society
T2 - 2006 MRS Spring Meeting
Y2 - 17 April 2006 through 21 April 2006
ER -