SPM studies on surface charge and local piezo-response of ferroelectric thin films

X. F. Chen; W. G. Zhu; W. G. Liu; O. K. Tan; X. Yao

doi:10.1080/00150190108016257

SPM studies on surface charge and local piezo-response of ferroelectric thin films

X. F. Chen^*, W. G. Zhu, W. G. Liu, O. K. Tan, X. Yao

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

Ferroelectric (Ba_0.67Sr_0.33)TiO₃ and Pb(Zr_0.53Ti_0.47)O₃ thin films have been prepared by the RF magnetron sputtering process, and characterized using scanning probe microscopy. Two distinct grain-boundary space charge regions are observed in the BST films by the contact KPFM. Such charged grain-boundaries are correlated to their leakage current behaviors. The ferroelectric domain and retention properties of the PZT 53/47 thin films are also investigated using EFM. The time dependence of the remnant polarization is identified to follow a stretched exponential decay.

Original language	English
Pages (from-to)	201-208
Number of pages	8
Journal	Ferroelectrics
Volume	252
Issue number	1-4
DOIs	https://doi.org/10.1080/00150190108016257
Publication status	Published - 2001
Externally published	Yes
Event	6th International Simposium on Ferroic Domains and Mesoscopic Structures (ISFD-6) - Nanjing, China Duration: May 29 2000 → Jun 2 2000

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics

Keywords

(BaSrTiO) thin film
Pb(ZrTi)O thin film
Scanning probe microscopy
Sputtering

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10.1080/00150190108016257

Cite this

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title = "SPM studies on surface charge and local piezo-response of ferroelectric thin films",

abstract = "Ferroelectric (Ba0.67Sr0.33)TiO3 and Pb(Zr0.53Ti0.47)O3 thin films have been prepared by the RF magnetron sputtering process, and characterized using scanning probe microscopy. Two distinct grain-boundary space charge regions are observed in the BST films by the contact KPFM. Such charged grain-boundaries are correlated to their leakage current behaviors. The ferroelectric domain and retention properties of the PZT 53/47 thin films are also investigated using EFM. The time dependence of the remnant polarization is identified to follow a stretched exponential decay.",

keywords = "(BaSrTiO) thin film, Pb(ZrTi)O thin film, Scanning probe microscopy, Sputtering",

author = "Chen, {X. F.} and Zhu, {W. G.} and Liu, {W. G.} and Tan, {O. K.} and X. Yao",

year = "2001",

doi = "10.1080/00150190108016257",

language = "English",

volume = "252",

pages = "201--208",

journal = "Ferroelectrics",

issn = "0015-0193",

publisher = "Taylor and Francis Ltd.",

number = "1-4",

note = "6th International Simposium on Ferroic Domains and Mesoscopic Structures (ISFD-6) ; Conference date: 29-05-2000 Through 02-06-2000",

}

TY - JOUR

T1 - SPM studies on surface charge and local piezo-response of ferroelectric thin films

AU - Chen, X. F.

AU - Zhu, W. G.

AU - Liu, W. G.

AU - Tan, O. K.

AU - Yao, X.

PY - 2001

Y1 - 2001

N2 - Ferroelectric (Ba0.67Sr0.33)TiO3 and Pb(Zr0.53Ti0.47)O3 thin films have been prepared by the RF magnetron sputtering process, and characterized using scanning probe microscopy. Two distinct grain-boundary space charge regions are observed in the BST films by the contact KPFM. Such charged grain-boundaries are correlated to their leakage current behaviors. The ferroelectric domain and retention properties of the PZT 53/47 thin films are also investigated using EFM. The time dependence of the remnant polarization is identified to follow a stretched exponential decay.

AB - Ferroelectric (Ba0.67Sr0.33)TiO3 and Pb(Zr0.53Ti0.47)O3 thin films have been prepared by the RF magnetron sputtering process, and characterized using scanning probe microscopy. Two distinct grain-boundary space charge regions are observed in the BST films by the contact KPFM. Such charged grain-boundaries are correlated to their leakage current behaviors. The ferroelectric domain and retention properties of the PZT 53/47 thin films are also investigated using EFM. The time dependence of the remnant polarization is identified to follow a stretched exponential decay.

KW - (BaSrTiO) thin film

KW - Pb(ZrTi)O thin film

KW - Scanning probe microscopy

KW - Sputtering

UR - http://www.scopus.com/inward/record.url?scp=0034862781&partnerID=8YFLogxK

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U2 - 10.1080/00150190108016257

DO - 10.1080/00150190108016257

M3 - Conference article

AN - SCOPUS:0034862781

SN - 0015-0193

VL - 252

SP - 201

EP - 208

JO - Ferroelectrics

JF - Ferroelectrics

IS - 1-4

T2 - 6th International Simposium on Ferroic Domains and Mesoscopic Structures (ISFD-6)

Y2 - 29 May 2000 through 2 June 2000

ER -

SPM studies on surface charge and local piezo-response of ferroelectric thin films

Abstract

ASJC Scopus Subject Areas

Keywords

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