Structural and dielectric properties of mesoporous silsesquioxane films

Suzhu Yu; Terence K.S. Wong; Xiao Hu; Kantisara Pita

doi:10.1016/j.cplett.2003.12.004

Structural and dielectric properties of mesoporous silsesquioxane films

Suzhu Yu^*, Terence K.S. Wong, Xiao Hu, Kantisara Pita

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

Mesoporous low dielectric constant films were successfully synthesized by covalently binding poly(amidoamine) (PAMAM) templating polymer to a hydrogen methyl silsesquioxane matrix via a coupling agent. The decomposition behavior of PAMAM was studied in different atmospheres and it was found that PAMAM degraded more effectively in air than in nitrogen. The physical, structural and dielectric properties of the mesoporous films were studied as a function of concentration of the templating polymer. The dielectric constant about 2.06 could be obtained with pore size less than 10 nm for a film with 20 wt% loading of the sacrificial polymer.

Original language	English
Pages (from-to)	63-67
Number of pages	5
Journal	Chemical Physics Letters
Volume	384
Issue number	1-3
DOIs	https://doi.org/10.1016/j.cplett.2003.12.004
Publication status	Published - Jan 19 2004
Externally published	Yes

ASJC Scopus Subject Areas

General Physics and Astronomy
Physical and Theoretical Chemistry

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10.1016/j.cplett.2003.12.004

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@article{8c49cdbf07f14c3cab5563bb729f5f2b,

title = "Structural and dielectric properties of mesoporous silsesquioxane films",

abstract = "Mesoporous low dielectric constant films were successfully synthesized by covalently binding poly(amidoamine) (PAMAM) templating polymer to a hydrogen methyl silsesquioxane matrix via a coupling agent. The decomposition behavior of PAMAM was studied in different atmospheres and it was found that PAMAM degraded more effectively in air than in nitrogen. The physical, structural and dielectric properties of the mesoporous films were studied as a function of concentration of the templating polymer. The dielectric constant about 2.06 could be obtained with pore size less than 10 nm for a film with 20 wt% loading of the sacrificial polymer.",

author = "Suzhu Yu and Wong, {Terence K.S.} and Xiao Hu and Kantisara Pita",

year = "2004",

month = jan,

day = "19",

doi = "10.1016/j.cplett.2003.12.004",

language = "English",

volume = "384",

pages = "63--67",

journal = "Chemical Physics Letters",

issn = "0009-2614",

publisher = "Elsevier",

number = "1-3",

}

TY - JOUR

T1 - Structural and dielectric properties of mesoporous silsesquioxane films

AU - Yu, Suzhu

AU - Wong, Terence K.S.

AU - Hu, Xiao

AU - Pita, Kantisara

PY - 2004/1/19

Y1 - 2004/1/19

N2 - Mesoporous low dielectric constant films were successfully synthesized by covalently binding poly(amidoamine) (PAMAM) templating polymer to a hydrogen methyl silsesquioxane matrix via a coupling agent. The decomposition behavior of PAMAM was studied in different atmospheres and it was found that PAMAM degraded more effectively in air than in nitrogen. The physical, structural and dielectric properties of the mesoporous films were studied as a function of concentration of the templating polymer. The dielectric constant about 2.06 could be obtained with pore size less than 10 nm for a film with 20 wt% loading of the sacrificial polymer.

AB - Mesoporous low dielectric constant films were successfully synthesized by covalently binding poly(amidoamine) (PAMAM) templating polymer to a hydrogen methyl silsesquioxane matrix via a coupling agent. The decomposition behavior of PAMAM was studied in different atmospheres and it was found that PAMAM degraded more effectively in air than in nitrogen. The physical, structural and dielectric properties of the mesoporous films were studied as a function of concentration of the templating polymer. The dielectric constant about 2.06 could be obtained with pore size less than 10 nm for a film with 20 wt% loading of the sacrificial polymer.

UR - http://www.scopus.com/inward/record.url?scp=0348230651&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0348230651&partnerID=8YFLogxK

U2 - 10.1016/j.cplett.2003.12.004

DO - 10.1016/j.cplett.2003.12.004

M3 - Article

AN - SCOPUS:0348230651

SN - 0009-2614

VL - 384

SP - 63

EP - 67

JO - Chemical Physics Letters

JF - Chemical Physics Letters

IS - 1-3

ER -

Structural and dielectric properties of mesoporous silsesquioxane films

Abstract

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