Structure and mechanical properties of tungsten carbide films deposited by off-plane double bend filtered cathodic vacuum arc

Y. H. Cheng; B. K. Tay

doi:10.1116/1.1540983

Structure and mechanical properties of tungsten carbide films deposited by off-plane double bend filtered cathodic vacuum arc

Y. H. Cheng^*, B. K. Tay

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The deposition of nanocrystalline tungsten carbide films was reported. The surface morphology, crystalline structure, internal stress, hardness and Young's modulus of the films were strongly dependent on the substrate bias. The high density and strain caused by the lattice mismatch between the different phases contributed to the highest internal stress, hardness and Young's modulus for the films deposited at a substrate bias of 200 V.

Original language	English
Pages (from-to)	411-415
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	21
Issue number	2
DOIs	https://doi.org/10.1116/1.1540983
Publication status	Published - Mar 2003
Externally published	Yes

ASJC Scopus Subject Areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "Structure and mechanical properties of tungsten carbide films deposited by off-plane double bend filtered cathodic vacuum arc",

abstract = "The deposition of nanocrystalline tungsten carbide films was reported. The surface morphology, crystalline structure, internal stress, hardness and Young's modulus of the films were strongly dependent on the substrate bias. The high density and strain caused by the lattice mismatch between the different phases contributed to the highest internal stress, hardness and Young's modulus for the films deposited at a substrate bias of 200 V.",

author = "Cheng, \{Y. H.\} and Tay, \{B. K.\}",

year = "2003",

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AU - Cheng, Y. H.

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N2 - The deposition of nanocrystalline tungsten carbide films was reported. The surface morphology, crystalline structure, internal stress, hardness and Young's modulus of the films were strongly dependent on the substrate bias. The high density and strain caused by the lattice mismatch between the different phases contributed to the highest internal stress, hardness and Young's modulus for the films deposited at a substrate bias of 200 V.

AB - The deposition of nanocrystalline tungsten carbide films was reported. The surface morphology, crystalline structure, internal stress, hardness and Young's modulus of the films were strongly dependent on the substrate bias. The high density and strain caused by the lattice mismatch between the different phases contributed to the highest internal stress, hardness and Young's modulus for the films deposited at a substrate bias of 200 V.

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Structure and mechanical properties of tungsten carbide films deposited by off-plane double bend filtered cathodic vacuum arc

Abstract

ASJC Scopus Subject Areas

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