Study of low-temperature thermocompression bonding in Ag-In solder for packaging applications

Riko I. Made, Chee Lip Gan, Li Ling Yan, Aibin Yu, Seung Wook Yoon, John H. Lau, Chengkuo Lee

Research output: Contribution to journalArticlepeer-review

50 Citations (Scopus)

Abstract

Low-temperature solders have wide applications in integrated circuits and micro-electromechanical systems packaging. In this article, a study on Ag-In solder for chip-to-chip thermocompression bonding was carried out. The resulting joint consists of AgIn 2 and Ag 9In 4 phases, with the latter phase having a melting temperature higher than 400°C. Complete consumption of In solder into a Ag-rich intermetallic compound is achieved by applying a bond pressure of 1.4 MPa at 180°C for 40 min. We also observe that the bonding pressure effect enables a Ag-rich phase to be formed within a shorter bonding duration (10 min) at a higher pressure of 1.6 MPa. Finally, prolonged aging leads to the formation of the final phase of Ag 9In 4 in the bonded joints.

Original languageEnglish
Pages (from-to)365-371
Number of pages7
JournalJournal of Electronic Materials
Volume38
Issue number2
DOIs
Publication statusPublished - Feb 2009
Externally publishedYes

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • IC
  • Indium
  • Low-temperature solder
  • MEMS
  • Packaging

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