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Study of spacer architecture and current leakage aspects of sub-micron self-aligned silicide process
C. W. Lim*, S. K. Lahiri, K. L. Pey, K. H. Lee, H. Wong, Vijay N. Chhagan, P. S. Tan, W. H. Chiu, L. Chan
*Corresponding author for this work
Research output: Contribution to conference › Paper › peer-review