Study on heat transfer of gas flow heated by nano-probe via Direct Simulation Monte Carlo (DSMC)

X. J. Liu, J. P. Yang, Y. W. Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Applications of heated tip/surface configuration for micro-/nano- electromechanical systems (MEMS/NEMS) have been widely explored in these years. Since the small gaps in these MEMS/NEMS are comparable to the mean free path of gaseous molecules, the heat transfer via gaseous molecules from the heated tip to the substrate is fundamentally different from macroscopic conduction or convection heat transfer in gases. In this paper, the heat transfer of the rarefied gases heated by hot nano-tip is investigated by means of the Direct Simulation Monte Carlo (DSMC) method. The results show that both tip geometry and tip-substrate distance affect the heat flux density distribution. With the increase of the crossing-angle θ of the nano-tip, the heat flux tends to decrease, while the spatial resolution tends to improve. Moreover, the heat flux density and spatial resolution tend to decrease with the increase of distance between the nano-tip and the substrate. Simulation results provide valuable information for the rational design and optimization of the heated nano-probe for topography applications such as thermally assisted data storage.

Original languageEnglish
Title of host publication2008 Proceedings of ASME International Mechanical Engineering Congress and Exposition, IMECE 2008
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages1287-1290
Number of pages4
EditionPART B
ISBN (Print)9780791848746
DOIs
Publication statusPublished - 2009
Externally publishedYes
Event2008 ASME International Mechanical Engineering Congress and Exposition, IMECE 2008 - Boston, MA, United States
Duration: Oct 31 2008Nov 6 2008

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings
NumberPART B
Volume13

Conference

Conference2008 ASME International Mechanical Engineering Congress and Exposition, IMECE 2008
Country/TerritoryUnited States
CityBoston, MA
Period10/31/0811/6/08

ASJC Scopus Subject Areas

  • Mechanical Engineering

Keywords

  • DSMC
  • Heat flux density
  • Nano-tip

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