Fingerprint
Dive into the research topics of 'Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits
J. A. Van Kan, T. C. Sum, T. Osipowicz, F. Watt
Research output: Contribution to journal › Conference article › peer-review
29
Citations
(Scopus)