Suicide formation from laser thermal processing of Ti/Co bilayers

F. L. Chow; K. L. Pey; P. S. Lee; C. H. Tung; X. C. Wang; G. C. Lim; Y. F. Chong

doi:10.1149/1.1788612

Suicide formation from laser thermal processing of Ti/Co bilayers

F. L. Chow^*, K. L. Pey, P. S. Lee, C. H. Tung, X. C. Wang, G. C. Lim, Y. F. Chong

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

A bilayered CoTi suicide structure consisting of an amorphous CoTi suicide and a highly textured CoTi silicide was found after pulsed excimer laser annealing of titanium/cobalt/silicon stack at high fluence of 0.6 J/cm ². The highly textured CoTi suicide is monocrystalline and fully coherent with the Si(111) plane of the substrate but has a large amount of microstructural defects. The constitutional supercooling phenomenon is the solidification mechanism responsible for the highly textured CoTi silicide. The incomplete crystallization shown by the presence of the amorphous CoTi silicide is attributed to a high concentration of titanium impurity.

Original language	English
Pages (from-to)	G213-G215
Journal	Electrochemical and Solid-State Letters
Volume	7
Issue number	10
DOIs	https://doi.org/10.1149/1.1788612
Publication status	Published - 2004
Externally published	Yes

ASJC Scopus Subject Areas

General Chemical Engineering
General Materials Science
Physical and Theoretical Chemistry
Electrochemistry
Electrical and Electronic Engineering

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10.1149/1.1788612

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title = "Suicide formation from laser thermal processing of Ti/Co bilayers",

abstract = "A bilayered CoTi suicide structure consisting of an amorphous CoTi suicide and a highly textured CoTi silicide was found after pulsed excimer laser annealing of titanium/cobalt/silicon stack at high fluence of 0.6 J/cm 2. The highly textured CoTi suicide is monocrystalline and fully coherent with the Si(111) plane of the substrate but has a large amount of microstructural defects. The constitutional supercooling phenomenon is the solidification mechanism responsible for the highly textured CoTi silicide. The incomplete crystallization shown by the presence of the amorphous CoTi silicide is attributed to a high concentration of titanium impurity.",

author = "Chow, {F. L.} and Pey, {K. L.} and Lee, {P. S.} and Tung, {C. H.} and Wang, {X. C.} and Lim, {G. C.} and Chong, {Y. F.}",

year = "2004",

doi = "10.1149/1.1788612",

language = "English",

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journal = "Electrochemical and Solid-State Letters",

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T1 - Suicide formation from laser thermal processing of Ti/Co bilayers

AU - Chow, F. L.

AU - Pey, K. L.

AU - Lee, P. S.

AU - Tung, C. H.

AU - Wang, X. C.

AU - Lim, G. C.

AU - Chong, Y. F.

PY - 2004

Y1 - 2004

N2 - A bilayered CoTi suicide structure consisting of an amorphous CoTi suicide and a highly textured CoTi silicide was found after pulsed excimer laser annealing of titanium/cobalt/silicon stack at high fluence of 0.6 J/cm 2. The highly textured CoTi suicide is monocrystalline and fully coherent with the Si(111) plane of the substrate but has a large amount of microstructural defects. The constitutional supercooling phenomenon is the solidification mechanism responsible for the highly textured CoTi silicide. The incomplete crystallization shown by the presence of the amorphous CoTi silicide is attributed to a high concentration of titanium impurity.

AB - A bilayered CoTi suicide structure consisting of an amorphous CoTi suicide and a highly textured CoTi silicide was found after pulsed excimer laser annealing of titanium/cobalt/silicon stack at high fluence of 0.6 J/cm 2. The highly textured CoTi suicide is monocrystalline and fully coherent with the Si(111) plane of the substrate but has a large amount of microstructural defects. The constitutional supercooling phenomenon is the solidification mechanism responsible for the highly textured CoTi silicide. The incomplete crystallization shown by the presence of the amorphous CoTi silicide is attributed to a high concentration of titanium impurity.

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DO - 10.1149/1.1788612

M3 - Article

AN - SCOPUS:8344250967

SN - 1099-0062

VL - 7

SP - G213-G215

JO - Electrochemical and Solid-State Letters

JF - Electrochemical and Solid-State Letters

IS - 10

ER -

Suicide formation from laser thermal processing of Ti/Co bilayers

Abstract

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