Temperature control with a thermoelectric cooler (TEC) during laser decapsulation of plastic packages

H. B. Kor, A. C.K. Chang, C. L. Gan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Ablation was carried out on high voltage Schottky rectifiers at 25°C and -5°C (with a thermoelectric cooler or TEC), at 1.0 W and 3.9 W of laser power. In-situ measurement of the reverse current was conducted and correlated to the device junction temperature. It was found that the usage of a TEC increases the number of laser scans to reach the set current compliance of 100 μA after exposing the die, for ablation at 3.9 W, although eventual damage to the device is still unavoidable. The incorporation of a TEC below the sample is also demonstrated to be effective in reducing the device junction temperature during laser ablation.

Original languageEnglish
Title of host publicationIPFA 2010 - 17th International Symposium on the Physical and Failure Analysis of Integrated Circuits
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event17th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2010 - Singapore, Singapore
Duration: Jul 5 2010Jul 9 2010

Publication series

NameProceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Conference

Conference17th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2010
Country/TerritorySingapore
CitySingapore
Period7/5/107/9/10

ASJC Scopus Subject Areas

  • Electrical and Electronic Engineering

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