TY - GEN
T1 - Temperature control with a thermoelectric cooler (TEC) during laser decapsulation of plastic packages
AU - Kor, H. B.
AU - Chang, A. C.K.
AU - Gan, C. L.
PY - 2010
Y1 - 2010
N2 - Ablation was carried out on high voltage Schottky rectifiers at 25°C and -5°C (with a thermoelectric cooler or TEC), at 1.0 W and 3.9 W of laser power. In-situ measurement of the reverse current was conducted and correlated to the device junction temperature. It was found that the usage of a TEC increases the number of laser scans to reach the set current compliance of 100 μA after exposing the die, for ablation at 3.9 W, although eventual damage to the device is still unavoidable. The incorporation of a TEC below the sample is also demonstrated to be effective in reducing the device junction temperature during laser ablation.
AB - Ablation was carried out on high voltage Schottky rectifiers at 25°C and -5°C (with a thermoelectric cooler or TEC), at 1.0 W and 3.9 W of laser power. In-situ measurement of the reverse current was conducted and correlated to the device junction temperature. It was found that the usage of a TEC increases the number of laser scans to reach the set current compliance of 100 μA after exposing the die, for ablation at 3.9 W, although eventual damage to the device is still unavoidable. The incorporation of a TEC below the sample is also demonstrated to be effective in reducing the device junction temperature during laser ablation.
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U2 - 10.1109/IPFA.2010.5531987
DO - 10.1109/IPFA.2010.5531987
M3 - Conference contribution
AN - SCOPUS:77956426135
SN - 9781424455973
T3 - Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
BT - IPFA 2010 - 17th International Symposium on the Physical and Failure Analysis of Integrated Circuits
T2 - 17th International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2010
Y2 - 5 July 2010 through 9 July 2010
ER -