Texture developing in TiO2/ORMOSIL composite sol-gel films by ECR etching

Wenxiu Que; W. G. Liu; Y. Zhou; Y. L. Lam; Y. C. Chan; S. D. Cheng; H. P. Li; Y. W. Chen; S. Buddhudu; C. H. Kam

doi:10.1016/S0167-577X(00)00050-1

Texture developing in TiO2/ORMOSIL composite sol-gel films by ECR etching

Wenxiu Que^*, W. G. Liu, Y. Zhou, Y. L. Lam, Y. C. Chan, S. D. Cheng, H. P. Li, Y. W. Chen, S. Buddhudu, C. H. Kam

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Composite waveguide film based on TiO₂/organically modified silane (ORMOSIL) has been synthesized through a sol-gel technique. Tetrapropylorthotitanate (Ti(OC3H7)4) and y-Glycidoxypropyltrimethoxysilane (GLYMO, [(CH₂OCH)CH₂O(CH2)₃]Si(OCH₃) ₃) were used as precursors for TiO₂/ORMOSIL composite films. Chain-like texture structure in the electron cyclotron resonance (ECR)-etched composite waveguide film was observed during the fabrication of optical channel waveguides. The morphology and structure were characterized by using scanning electron microscopy (SEM) and Fourier transforms infrared spectroscopy (FTIR). It is proposed that the formation of the texture structure be due to the induced polymerization of the GLYMO monomer in the presence of plasma or gas catalyst.

Original language	English
Pages (from-to)	309-313
Number of pages	5
Journal	Materials Letters
Volume	44
Issue number	5
DOIs	https://doi.org/10.1016/S0167-577X(00)00050-1
Publication status	Published - 2000
Externally published	Yes

ASJC Scopus Subject Areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Keywords

Composite
Electron cyclotron resonance
Optical channel waveguides
Organically modified silane
Polymerization
Sol-gel technique
Texture structure

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10.1016/S0167-577X(00)00050-1

Cite this

@article{8e986e4f081f4644819fe534fba13056,

title = "Texture developing in TiO2/ORMOSIL composite sol-gel films by ECR etching",

abstract = "Composite waveguide film based on TiO2/organically modified silane (ORMOSIL) has been synthesized through a sol-gel technique. Tetrapropylorthotitanate (Ti(OC3H7)4) and y-Glycidoxypropyltrimethoxysilane (GLYMO, [(CH2OCH)CH2O(CH2)3]Si(OCH3) 3) were used as precursors for TiO2/ORMOSIL composite films. Chain-like texture structure in the electron cyclotron resonance (ECR)-etched composite waveguide film was observed during the fabrication of optical channel waveguides. The morphology and structure were characterized by using scanning electron microscopy (SEM) and Fourier transforms infrared spectroscopy (FTIR). It is proposed that the formation of the texture structure be due to the induced polymerization of the GLYMO monomer in the presence of plasma or gas catalyst.",

keywords = "Composite, Electron cyclotron resonance, Optical channel waveguides, Organically modified silane, Polymerization, Sol-gel technique, Texture structure",

author = "Wenxiu Que and Liu, {W. G.} and Y. Zhou and Lam, {Y. L.} and Chan, {Y. C.} and Cheng, {S. D.} and Li, {H. P.} and Chen, {Y. W.} and S. Buddhudu and Kam, {C. H.}",

year = "2000",

doi = "10.1016/S0167-577X(00)00050-1",

language = "English",

volume = "44",

pages = "309--313",

journal = "Materials Letters",

issn = "0167-577X",

publisher = "Elsevier",

number = "5",

}

TY - JOUR

T1 - Texture developing in TiO2/ORMOSIL composite sol-gel films by ECR etching

AU - Que, Wenxiu

AU - Liu, W. G.

AU - Zhou, Y.

AU - Lam, Y. L.

AU - Chan, Y. C.

AU - Cheng, S. D.

AU - Li, H. P.

AU - Chen, Y. W.

AU - Buddhudu, S.

AU - Kam, C. H.

PY - 2000

Y1 - 2000

N2 - Composite waveguide film based on TiO2/organically modified silane (ORMOSIL) has been synthesized through a sol-gel technique. Tetrapropylorthotitanate (Ti(OC3H7)4) and y-Glycidoxypropyltrimethoxysilane (GLYMO, [(CH2OCH)CH2O(CH2)3]Si(OCH3) 3) were used as precursors for TiO2/ORMOSIL composite films. Chain-like texture structure in the electron cyclotron resonance (ECR)-etched composite waveguide film was observed during the fabrication of optical channel waveguides. The morphology and structure were characterized by using scanning electron microscopy (SEM) and Fourier transforms infrared spectroscopy (FTIR). It is proposed that the formation of the texture structure be due to the induced polymerization of the GLYMO monomer in the presence of plasma or gas catalyst.

AB - Composite waveguide film based on TiO2/organically modified silane (ORMOSIL) has been synthesized through a sol-gel technique. Tetrapropylorthotitanate (Ti(OC3H7)4) and y-Glycidoxypropyltrimethoxysilane (GLYMO, [(CH2OCH)CH2O(CH2)3]Si(OCH3) 3) were used as precursors for TiO2/ORMOSIL composite films. Chain-like texture structure in the electron cyclotron resonance (ECR)-etched composite waveguide film was observed during the fabrication of optical channel waveguides. The morphology and structure were characterized by using scanning electron microscopy (SEM) and Fourier transforms infrared spectroscopy (FTIR). It is proposed that the formation of the texture structure be due to the induced polymerization of the GLYMO monomer in the presence of plasma or gas catalyst.

KW - Composite

KW - Electron cyclotron resonance

KW - Optical channel waveguides

KW - Organically modified silane

KW - Polymerization

KW - Sol-gel technique

KW - Texture structure

UR - http://www.scopus.com/inward/record.url?scp=0009757967&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0009757967&partnerID=8YFLogxK

U2 - 10.1016/S0167-577X(00)00050-1

DO - 10.1016/S0167-577X(00)00050-1

M3 - Article

AN - SCOPUS:0009757967

SN - 0167-577X

VL - 44

SP - 309

EP - 313

JO - Materials Letters

JF - Materials Letters

IS - 5

ER -

Texture developing in TiO2/ORMOSIL composite sol-gel films by ECR etching

Abstract

ASJC Scopus Subject Areas

Keywords

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