@inproceedings{35bf936e46904ccaab14dce299e2be84,
title = "The dielectric tunability of Ba0.6Sr0.4TiO 3 thin films deposited by radio-frequency magnetron sputtering",
abstract = "Ba0.6Sr0.4TiO3 (BST) thin films with the thickness of 300nm were deposited on Pt/SiO2/Si substrates at various deposition temperatures by RF magnetron sputtering technique, and their electric properties were investigated. Due to the high temperature annealing process at substrate temperature of 600 °C, well-crystallized BST film was deposited. The dielectric constant and dielectric loss of the film deposited at 600 °C are 300 and 0.033 at 100 kHz, respectively. Due to the good crystallinity of the BST films deposited by RF magnetron sputtering, high dielectric tunability up to 39.2\% is achieved at a low applied voltage of 5V.",
keywords = "BST thin films, Dielectrics, Sputtering",
author = "Zuyong Feng and Wei Chen and Tan, \{Ooi Kiang\}",
year = "2009",
language = "English",
isbn = "9781439817827",
series = "Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009",
pages = "660--663",
booktitle = "Nanotechnology 2009",
note = "Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009 ; Conference date: 03-05-2009 Through 07-05-2009",
}