The dielectric tunability of Ba_0.6Sr_0.4TiO ₃ thin films deposited by radio-frequency magnetron sputtering

Keyphrases

• Dielectric Tunability 100%
• Ba0.6Sr0.4TiO3 100%
• Radio Frequency Magnetron Sputtering 100%
• Silica 33%
• Crystallinity 33%
• Si Substrate 33%
• Dielectric Constant 33%
• Deposition Temperature 33%
• High-k Dielectric 33%
• Dielectric Loss 33%
• Annealing Process 33%
• Substrate Temperature 33%
• High-temperature Annealing 33%
• Constant Losses 33%
• RF Magnetron Sputtering 33%
• Electric Properties 33%
• RF Sputtering Method 33%
• Low Applied Voltage 33%

Material Science

• Dielectric Material 100%
• Film 100%
• Thin Films 100%
• Magnetron Sputtering 100%
• Permittivity 33%