The effects of Ca and Pd dopants on gold bonding wire and gold rod

T. S. Saraswati*, T. Sritharan, C. I. Pang, Y. H. Chew, C. D. Breach, F. Wulff, S. G. Mhaisalkar, C. C. Wong

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

18 Citations (Scopus)

Abstract

There is currently little information regarding the physiochemical effects of common bonding wire dopants such as Ca and Pd despite the use of gold bonding wire as an electrical interconnection in over 80% of semiconductor devices. This paper presents experimental results on the residual microstrains in 4 N gold bonding wires with different concentrations of Ca-Pd, measured using peak broadening in X-ray diffraction. The effect of Ca was found to be more prominent. In order to understand more about the physiochemical action of Ca and its effects on the microstructure, TEM and depth sensing nano-indentation (DSI) were used to study 2 mm Ca-doped hard-drawn rods.

Original languageEnglish
Pages (from-to)351-356
Number of pages6
JournalThin Solid Films
Volume462-463
Issue numberSPEC. ISS.
DOIs
Publication statusPublished - Sept 2004
Externally publishedYes

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

Keywords

  • Depth sensing indentation
  • Gold bonding wire
  • TEM
  • X-ray stress analysis

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