Thermal stability of nonhydrogenated multilayer amorphous carbon prepared by the filtered cathodic vacuum arc technique

Edwin H.T. Teo; M. L. Lee; C. K. Lee; C. L. Ee; B. K. Tay; Daniel H.C. Chua

doi:10.1116/1.2712193

Thermal stability of nonhydrogenated multilayer amorphous carbon prepared by the filtered cathodic vacuum arc technique

Edwin H.T. Teo, M. L. Lee, C. K. Lee, C. L. Ee, B. K. Tay^*, Daniel H.C. Chua

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Through discrete modulation of the deposition biasing conditions, multilayered nonhydrogenated diamondlike amorphous carbon films were prepared by the filtered cathodic vacuum arc technique. Films deposited under different conditions were divided into two groups in order to study how the modulation as well as sublayer content affect various mechanical and material properties as deposited and after annealing in vacuum. A 30% decrease in the residual stress of the multilayer films from 4.3 to 2.8 GPa was observed with only marginal (5%) changes in the hardness. The frictional characteristics of the multilayer films were also studied and shown to be excellent, having a coefficient of friction of 0.1 and stable with annealing. A larger decrease in the resistance to wear was observed in multilayer films richer in soft sublayers which was linked to the decreased in sp³ content in the films.

Original language	English
Pages (from-to)	421-424
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	25
Issue number	3
DOIs	https://doi.org/10.1116/1.2712193
Publication status	Published - 2007
Externally published	Yes

ASJC Scopus Subject Areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "Through discrete modulation of the deposition biasing conditions, multilayered nonhydrogenated diamondlike amorphous carbon films were prepared by the filtered cathodic vacuum arc technique. Films deposited under different conditions were divided into two groups in order to study how the modulation as well as sublayer content affect various mechanical and material properties as deposited and after annealing in vacuum. A 30% decrease in the residual stress of the multilayer films from 4.3 to 2.8 GPa was observed with only marginal (5%) changes in the hardness. The frictional characteristics of the multilayer films were also studied and shown to be excellent, having a coefficient of friction of 0.1 and stable with annealing. A larger decrease in the resistance to wear was observed in multilayer films richer in soft sublayers which was linked to the decreased in sp3 content in the films.",

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T1 - Thermal stability of nonhydrogenated multilayer amorphous carbon prepared by the filtered cathodic vacuum arc technique

AU - Teo, Edwin H.T.

AU - Lee, M. L.

AU - Lee, C. K.

AU - Ee, C. L.

AU - Tay, B. K.

AU - Chua, Daniel H.C.

PY - 2007

Y1 - 2007

N2 - Through discrete modulation of the deposition biasing conditions, multilayered nonhydrogenated diamondlike amorphous carbon films were prepared by the filtered cathodic vacuum arc technique. Films deposited under different conditions were divided into two groups in order to study how the modulation as well as sublayer content affect various mechanical and material properties as deposited and after annealing in vacuum. A 30% decrease in the residual stress of the multilayer films from 4.3 to 2.8 GPa was observed with only marginal (5%) changes in the hardness. The frictional characteristics of the multilayer films were also studied and shown to be excellent, having a coefficient of friction of 0.1 and stable with annealing. A larger decrease in the resistance to wear was observed in multilayer films richer in soft sublayers which was linked to the decreased in sp3 content in the films.

AB - Through discrete modulation of the deposition biasing conditions, multilayered nonhydrogenated diamondlike amorphous carbon films were prepared by the filtered cathodic vacuum arc technique. Films deposited under different conditions were divided into two groups in order to study how the modulation as well as sublayer content affect various mechanical and material properties as deposited and after annealing in vacuum. A 30% decrease in the residual stress of the multilayer films from 4.3 to 2.8 GPa was observed with only marginal (5%) changes in the hardness. The frictional characteristics of the multilayer films were also studied and shown to be excellent, having a coefficient of friction of 0.1 and stable with annealing. A larger decrease in the resistance to wear was observed in multilayer films richer in soft sublayers which was linked to the decreased in sp3 content in the films.

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Thermal stability of nonhydrogenated multilayer amorphous carbon prepared by the filtered cathodic vacuum arc technique

Abstract

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