Thickness-dependent sensitivity of Copper Phthalocyanine chemiresistive Nitrogen Dioxide sensors

Liping Sharon Chia, Suresh Palale, Pooi See Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Chemiresistors of varying Copper Phthalocyanine sensing layer thickness, from 10 to 350 nm, have been fabricated and tested for sensing to sub-ppm levels of Nitrogen Dioxide. The results obtained were analyzed and the kinetics was shown to correlate well with first order kinetics, rather than with Elovich model. In explaining the sensitivity trend to thickness variation, gas diffusion into the layer was found to play a role and should be taken into consideration.

Original languageEnglish
Title of host publicationIEEE Sensors, SENSORS 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479982875
DOIs
Publication statusPublished - Jan 5 2016
Externally publishedYes
Event15th IEEE Sensors Conference, SENSORS 2016 - Orlando, United States
Duration: Oct 30 2016Nov 2 2016

Publication series

NameProceedings of IEEE Sensors
Volume0
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference15th IEEE Sensors Conference, SENSORS 2016
Country/TerritoryUnited States
CityOrlando
Period10/30/1611/2/16

Bibliographical note

Publisher Copyright:
© 2016 IEEE.

ASJC Scopus Subject Areas

  • Electrical and Electronic Engineering

Keywords

  • gas sensor
  • metal phthalocyanine
  • nitrogen dioxide
  • thickness

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