Abstract
Chemiresistors of varying Copper Phthalocyanine sensing layer thickness, from 10 to 350 nm, have been fabricated and tested for sensing to sub-ppm levels of Nitrogen Dioxide. The results obtained were analyzed and the kinetics was shown to correlate well with first order kinetics, rather than with Elovich model. In explaining the sensitivity trend to thickness variation, gas diffusion into the layer was found to play a role and should be taken into consideration.
Original language | English |
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Title of host publication | IEEE Sensors, SENSORS 2016 - Proceedings |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
ISBN (Electronic) | 9781479982875 |
DOIs | |
Publication status | Published - Jan 5 2016 |
Externally published | Yes |
Event | 15th IEEE Sensors Conference, SENSORS 2016 - Orlando, United States Duration: Oct 30 2016 → Nov 2 2016 |
Publication series
Name | Proceedings of IEEE Sensors |
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Volume | 0 |
ISSN (Print) | 1930-0395 |
ISSN (Electronic) | 2168-9229 |
Conference
Conference | 15th IEEE Sensors Conference, SENSORS 2016 |
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Country/Territory | United States |
City | Orlando |
Period | 10/30/16 → 11/2/16 |
Bibliographical note
Publisher Copyright:© 2016 IEEE.
ASJC Scopus Subject Areas
- Electrical and Electronic Engineering
Keywords
- gas sensor
- metal phthalocyanine
- nitrogen dioxide
- thickness