Thin Film stress evaluation by a glancing X-ray beam

A new method with a glancing X-ray beam projected onto the sample was proposed for internal stress measurement in thin films. With this method, when the relationship between 2Θ and sin²Ψ is nonlinear, as long as the glancing angle is small enough, the curvature in 2Θ-sin²Ψ plot will be eliminated and the stress can be calculated in terms of the linear slope. When the relationship between 2Θ and sin²Ψ is linear, as long as the glancing angle is changed step by step, the internal stress distribution through the film depth could also be evaluated.