Thin films of LiNb0.5Ta0.5O3 prepared on SiO2/Si substrates by sol-gel processing

S. D. Cheng; C. H. Kam; Y. Zhou; Y. L. Lam; Y. C. Chan; W. S. Gan

doi:10.1117/12.343731

Thin films of LiNb_0.5Ta_0.5O₃ prepared on SiO₂/Si substrates by sol-gel processing

S. D. Cheng^*, C. H. Kam, Y. Zhou, Y. L. Lam, Y. C. Chan, W. S. Gan

^*Corresponding author for this work

Nanyang Technological University

Research output: Contribution to journal › Conference article › peer-review

Abstract

In this paper, we report the preparation and characterization of sol-gel derived thin films of LiNb_0.5Ta_0.5O₃ on the silica-on silicon substrate. The solution is prepared by mixing LiOC₂H₅, Nb(OC₂H₅)₅ and Ta(OC₂H₅)₅ and the thin films are prepared using spin coating. The films are annealed at different temperatures of 400, 500, 600, and 700°C. Our X-ray diffraction study shows that the films are amorphous when annealed at 400°C and are crystallized over 500°C. The crystallized films are slightly a-axis oriented. Nanocrystalline grains with the size of about several tens of nanometers are observed in the crystallized films under an atomic force microscope, making the films potential candidates for electro-optical/acousto-optical applications.

Original language	English
Pages (from-to)	206-211
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3620
DOIs	https://doi.org/10.1117/12.343731
Publication status	Published - 1999
Externally published	Yes
Event	Proceedings of the 1999 Integrated Optics Devices III - San Jose, CA, USA Duration: Jan 25 1999 → Jan 27 1999

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.343731

Cite this

@article{437c73b255354229b6f03cb49a4ddcb0,

title = "Thin films of LiNb0.5Ta0.5O3 prepared on SiO2/Si substrates by sol-gel processing",

abstract = "In this paper, we report the preparation and characterization of sol-gel derived thin films of LiNb0.5Ta0.5O3 on the silica-on silicon substrate. The solution is prepared by mixing LiOC2H5, Nb(OC2H5)5 and Ta(OC2H5)5 and the thin films are prepared using spin coating. The films are annealed at different temperatures of 400, 500, 600, and 700°C. Our X-ray diffraction study shows that the films are amorphous when annealed at 400°C and are crystallized over 500°C. The crystallized films are slightly a-axis oriented. Nanocrystalline grains with the size of about several tens of nanometers are observed in the crystallized films under an atomic force microscope, making the films potential candidates for electro-optical/acousto-optical applications.",

author = "Cheng, {S. D.} and Kam, {C. H.} and Y. Zhou and Lam, {Y. L.} and Chan, {Y. C.} and Gan, {W. S.}",

year = "1999",

doi = "10.1117/12.343731",

language = "English",

volume = "3620",

pages = "206--211",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Proceedings of the 1999 Integrated Optics Devices III ; Conference date: 25-01-1999 Through 27-01-1999",

}

TY - JOUR

T1 - Thin films of LiNb0.5Ta0.5O3 prepared on SiO2/Si substrates by sol-gel processing

AU - Cheng, S. D.

AU - Kam, C. H.

AU - Zhou, Y.

AU - Lam, Y. L.

AU - Chan, Y. C.

AU - Gan, W. S.

PY - 1999

Y1 - 1999

N2 - In this paper, we report the preparation and characterization of sol-gel derived thin films of LiNb0.5Ta0.5O3 on the silica-on silicon substrate. The solution is prepared by mixing LiOC2H5, Nb(OC2H5)5 and Ta(OC2H5)5 and the thin films are prepared using spin coating. The films are annealed at different temperatures of 400, 500, 600, and 700°C. Our X-ray diffraction study shows that the films are amorphous when annealed at 400°C and are crystallized over 500°C. The crystallized films are slightly a-axis oriented. Nanocrystalline grains with the size of about several tens of nanometers are observed in the crystallized films under an atomic force microscope, making the films potential candidates for electro-optical/acousto-optical applications.

AB - In this paper, we report the preparation and characterization of sol-gel derived thin films of LiNb0.5Ta0.5O3 on the silica-on silicon substrate. The solution is prepared by mixing LiOC2H5, Nb(OC2H5)5 and Ta(OC2H5)5 and the thin films are prepared using spin coating. The films are annealed at different temperatures of 400, 500, 600, and 700°C. Our X-ray diffraction study shows that the films are amorphous when annealed at 400°C and are crystallized over 500°C. The crystallized films are slightly a-axis oriented. Nanocrystalline grains with the size of about several tens of nanometers are observed in the crystallized films under an atomic force microscope, making the films potential candidates for electro-optical/acousto-optical applications.

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JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Proceedings of the 1999 Integrated Optics Devices III

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