Abstract
A new magnetic macroparticle filter design consisting of an off-plane double-bend (OPDB) filter is described. The transport of the vacuum arc plasma through this OPDB filter is investigated using Langmuir and deposition probes. Films of amorphous hard carbon have been deposited using a 90° single bend and the OPDB filter and the macroparticle contents of the films are compared. The experimental results were found to be in good agreement with the simulations results based on an improved drift approximation model. The results demonstrate that OPDB filter has a relatively better transmission efficiency than the 90° single bend filter, lower macroparticle counts and is suitable for preparation of diamond-like carbon coatings with high quality.
| Original language | English |
|---|---|
| Pages (from-to) | 1-6 |
| Number of pages | 6 |
| Journal | Thin Solid Films |
| Volume | 345 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - May 7 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1998 11th Symposium on Plasma Science for Materials (SPSM-11) / 4th Asia-Pacific Conference on Plasma Science and Technology (APCPST-4) - Sydney, NSW, Aust Duration: Jul 27 1998 → Jul 29 1998 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry