Tribological properties of tetrahedral carbon films deposited by filtered cathodic vacuum arc technique

Keyphrases

• Carbon Film 100%
• Filtered Cathodic Vacuum Arc 100%
• Ion Energy 100%
• Arc Technique 100%
• Tribological Properties 100%
• Young's Modulus 33%
• Transcranial Alternating Current Stimulation (tACS) 33%
• Sapphire 33%
• Nanoindenter 33%
• Content Ratio 33%
• Silicon Substrate 33%
• Sp3 Content 33%
• Sapphire Substrate 33%
• Carbon Ions 33%
• Frictional Coefficient 33%
• Depth Sensing 33%
• Film Density 33%
• Ultra-low Load 33%

Engineering

• Deposited Film 100%
• Ion Energy 100%
• Energy Engineering 33%
• Young's Modulus 33%
• Silicon Substrate 33%
• Sapphire Substrate 33%
• Critical Load 33%
• Film Density 33%

Material Science

• Film 100%
• Carbon Films 100%
• Sapphire 50%
• Young's Modulus 25%
• Density 25%
• Silicon 25%