Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask

Simon Chun Kiat Goh; Li Lynn Shiau; Nan Chen; Kailiang Chuan; Beng Kang Tay; Chuan Seng Tan

doi:10.1109/NEMS.2018.8556967

Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask

Simon Chun Kiat Goh, Li Lynn Shiau, Nan Chen, Kailiang Chuan, Beng Kang Tay, Chuan Seng Tan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports for the first time that by subjecting electron beam exposed SU-8 to a post exposure delay of one hour, the resist contrast improves ten-fold. Thereafter, hard bake process is introduced to reduce resist peel off from the substrate. The SU-8 is used as a hard mask to fabricate 90° pillars on Si substrate with an etch selectivity of 1:60. High refractive index Si pillars and low refractive index air gap form the building block of dielectric Bragg mirror. In total, two sets of Si-Air mirrors sandwich a varying cavity length on each side. The linear variable optical filter (LVOF) is measured and characterized using a bench-Top spectrometer as well as scanning electron microscopy. The filter has a bandpass from 3100 to 3900 nm and a scallop size of 30 nm which outperforms the λ10 norm.

Original language	English
Title of host publication	NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	652-655
Number of pages	4
ISBN (Electronic)	9781538652732
DOIs	https://doi.org/10.1109/NEMS.2018.8556967
Publication status	Published - Dec 3 2018
Externally published	Yes
Event	13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018 - Singapore, Singapore Duration: Apr 22 2018 → Apr 26 2018

Publication series

Name	NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference	13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018
Country/Territory	Singapore
City	Singapore
Period	4/22/18 → 4/26/18

Bibliographical note

Publisher Copyright:
© 2018 IEEE.

ASJC Scopus Subject Areas

Biomedical Engineering
Electrical and Electronic Engineering
Instrumentation

Access to Document

10.1109/NEMS.2018.8556967

Cite this

Kiat Goh, S. C., Shiau, L. L., Chen, N., Chuan, K., Tay, B. K., & Tan, C. S. (2018). Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask. In NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 652-655). Article 8556967 (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2018.8556967

Kiat Goh, Simon Chun ; Shiau, Li Lynn ; Chen, Nan et al. / Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask. NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 652-655 (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

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title = "Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask",

abstract = "This paper reports for the first time that by subjecting electron beam exposed SU-8 to a post exposure delay of one hour, the resist contrast improves ten-fold. Thereafter, hard bake process is introduced to reduce resist peel off from the substrate. The SU-8 is used as a hard mask to fabricate 90° pillars on Si substrate with an etch selectivity of 1:60. High refractive index Si pillars and low refractive index air gap form the building block of dielectric Bragg mirror. In total, two sets of Si-Air mirrors sandwich a varying cavity length on each side. The linear variable optical filter (LVOF) is measured and characterized using a bench-Top spectrometer as well as scanning electron microscopy. The filter has a bandpass from 3100 to 3900 nm and a scallop size of 30 nm which outperforms the λ10 norm.",

author = "{Kiat Goh}, {Simon Chun} and Shiau, {Li Lynn} and Nan Chen and Kailiang Chuan and Tay, {Beng Kang} and Tan, {Chuan Seng}",

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doi = "10.1109/NEMS.2018.8556967",

language = "English",

series = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

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Kiat Goh, SC, Shiau, LL, Chen, N, Chuan, K, Tay, BK & Tan, CS 2018, Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask. in NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems., 8556967, NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Institute of Electrical and Electronics Engineers Inc., pp. 652-655, 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, 4/22/18. https://doi.org/10.1109/NEMS.2018.8556967

Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask. / Kiat Goh, Simon Chun; Shiau, Li Lynn; Chen, Nan et al.
NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., 2018. p. 652-655 8556967 (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Tay, Beng Kang

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Kiat Goh SC, Shiau LL, Chen N, Chuan K, Tay BK, Tan CS. Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask. In NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc. 2018. p. 652-655. 8556967. (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems). doi: 10.1109/NEMS.2018.8556967

Two-Step Fabrication of Mid-Infrared Linear Variable Optical Filter Using SU-8 as Mask

Abstract

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Bibliographical note

ASJC Scopus Subject Areas

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