Ultrasound radiating performances of piezoelectric micromachined ultrasonic transmitter

Zhihong Wang; Weiguang Zhu; Ooi Kiang Tan; Chen Chao; Hong Zhu; Jianmin Miao

doi:10.1063/1.1855417

Ultrasound radiating performances of piezoelectric micromachined ultrasonic transmitter

Zhihong Wang, Weiguang Zhu, Ooi Kiang Tan, Chen Chao, Hong Zhu, Jianmin Miao

Nanyang Technological University

Research output: Contribution to journal › Article › peer-review

42 Citations (Scopus)

Abstract

This letter reports on a membrane-type piezoelectric micromachined ultrasonic transducer (pMUT). It consists of 3.5 or 7 μm thick composite lead zirconate titanate (PZT) film on a multilayered membrane and works as an ultrasonic transmitter. The ultrasound-radiating performance of the transmitter, in response to a continuous ac driving voltage, has been tested systematically. The generated sound pressure level at resonance frequency of the transmitter varies with the applied dc bias and driving voltage and can exceed 110 dB at a measuring distance of 12 mm. For a given square membrane with the same multilayer structure and thickness, the resonance frequency of the transmitter is inversely proportional to the area of the membrane, and can be further tuned by control of the poling conditions of the PZT film or the applied dc bias.

Original language	English
Article number	033508
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	86
Issue number	3
DOIs	https://doi.org/10.1063/1.1855417
Publication status	Published - Jan 17 2005
Externally published	Yes

ASJC Scopus Subject Areas

Physics and Astronomy (miscellaneous)

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abstract = "This letter reports on a membrane-type piezoelectric micromachined ultrasonic transducer (pMUT). It consists of 3.5 or 7 μm thick composite lead zirconate titanate (PZT) film on a multilayered membrane and works as an ultrasonic transmitter. The ultrasound-radiating performance of the transmitter, in response to a continuous ac driving voltage, has been tested systematically. The generated sound pressure level at resonance frequency of the transmitter varies with the applied dc bias and driving voltage and can exceed 110 dB at a measuring distance of 12 mm. For a given square membrane with the same multilayer structure and thickness, the resonance frequency of the transmitter is inversely proportional to the area of the membrane, and can be further tuned by control of the poling conditions of the PZT film or the applied dc bias.",

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AU - Wang, Zhihong

AU - Zhu, Weiguang

AU - Tan, Ooi Kiang

AU - Chao, Chen

AU - Zhu, Hong

AU - Miao, Jianmin

PY - 2005/1/17

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N2 - This letter reports on a membrane-type piezoelectric micromachined ultrasonic transducer (pMUT). It consists of 3.5 or 7 μm thick composite lead zirconate titanate (PZT) film on a multilayered membrane and works as an ultrasonic transmitter. The ultrasound-radiating performance of the transmitter, in response to a continuous ac driving voltage, has been tested systematically. The generated sound pressure level at resonance frequency of the transmitter varies with the applied dc bias and driving voltage and can exceed 110 dB at a measuring distance of 12 mm. For a given square membrane with the same multilayer structure and thickness, the resonance frequency of the transmitter is inversely proportional to the area of the membrane, and can be further tuned by control of the poling conditions of the PZT film or the applied dc bias.

AB - This letter reports on a membrane-type piezoelectric micromachined ultrasonic transducer (pMUT). It consists of 3.5 or 7 μm thick composite lead zirconate titanate (PZT) film on a multilayered membrane and works as an ultrasonic transmitter. The ultrasound-radiating performance of the transmitter, in response to a continuous ac driving voltage, has been tested systematically. The generated sound pressure level at resonance frequency of the transmitter varies with the applied dc bias and driving voltage and can exceed 110 dB at a measuring distance of 12 mm. For a given square membrane with the same multilayer structure and thickness, the resonance frequency of the transmitter is inversely proportional to the area of the membrane, and can be further tuned by control of the poling conditions of the PZT film or the applied dc bias.

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Ultrasound radiating performances of piezoelectric micromachined ultrasonic transmitter

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