Wafer-Level Fabrication and Gas Sensing Properties of miniaturized gas sensors based on Inductively Coupled Plasma Deposited Tin Oxide Nanorods

A. Forleo*, L. Francioso, S. Capone, F. Casino, P. Siciliano, O. K. Tan, H. Hui

*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

10 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Wafer-Level Fabrication and Gas Sensing Properties of miniaturized gas sensors based on Inductively Coupled Plasma Deposited Tin Oxide Nanorods'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering