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XPS and SIMS studies of CVD-grown cubic SiC films on Si(100)
A. T.S. Wee*, Z. C. Feng, H. H. Hng, K. L. Tan, C. C. Tin, R. Hu, R. Coston
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
5
Citations
(Scopus)