Abstract
Zinc oxide (ZnO) quantum dots (QDs) were fabricated on silicon substrates by metal organic chemical vapor deposition. Formation of QDs is due to the vigorous reaction of the precursors when a large amount of precursors was introduced during the growth. The size of the QDs ranged from 3 to 12 nm, which was estimated by high-resolution transmission electron microscopy. The photoluminescence measured at 80 K showed that the emission of QDs embedded film ranged from 3.0 to 3.6 eV. The broad near-band-edge emission was due to the quantum confinement effect of the QDs.
Original language | English |
---|---|
Pages (from-to) | 518-522 |
Number of pages | 5 |
Journal | Journal of Crystal Growth |
Volume | 290 |
Issue number | 2 |
DOIs | |
Publication status | Published - May 1 2006 |
Externally published | Yes |
ASJC Scopus Subject Areas
- Condensed Matter Physics
- Inorganic Chemistry
- Materials Chemistry
Keywords
- A2. MOCVD
- A3. Quantum dots
- B1. Nanocrystals
- B1. ZnO