Zinc oxide quantum dots embedded films by metal organic chemical vapor deposition

S. T. Tan, X. W. Sun*, X. H. Zhang, B. J. Chen, S. J. Chua, Anna Yong, Z. L. Dong, X. Hu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

41 Citations (Scopus)

Abstract

Zinc oxide (ZnO) quantum dots (QDs) were fabricated on silicon substrates by metal organic chemical vapor deposition. Formation of QDs is due to the vigorous reaction of the precursors when a large amount of precursors was introduced during the growth. The size of the QDs ranged from 3 to 12 nm, which was estimated by high-resolution transmission electron microscopy. The photoluminescence measured at 80 K showed that the emission of QDs embedded film ranged from 3.0 to 3.6 eV. The broad near-band-edge emission was due to the quantum confinement effect of the QDs.

Original languageEnglish
Pages (from-to)518-522
Number of pages5
JournalJournal of Crystal Growth
Volume290
Issue number2
DOIs
Publication statusPublished - May 1 2006
Externally publishedYes

ASJC Scopus Subject Areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

Keywords

  • A2. MOCVD
  • A3. Quantum dots
  • B1. Nanocrystals
  • B1. ZnO

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